Method for polysilicon conductor (PC) Trimming for shrinking critical dimension and isolated-nested offset correction | Patent Application Number 9821478

9821478
Appealed
Patent Number-
Publication NumberUS 20020142252 A1
Filled DateMar 29, 2001
Priority DateMar 29, 2001
Inventor/ApplicantsHung Yip Ng
ExaminesDUDA, KATHLEEN
Art Unit1756
Technology Center1700
Assignments
International Business Machines
Current
International Business Machines
Original
Law Firm
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