Method for forming source/drain contacts utilizing an inhibitor | Patent Application Number 18329126

18329126
Not Appealed
Patent NumberUS 12166092 B2
Publication NumberUS 20230326983 A1
Filled DateJun 5, 2023
Priority DateFeb 27, 2020
Inventor/ApplicantsChia-Hao Chang
Lin-Yu Huang
Yu-Ming Lin
Li-Zhen Yu
Chih-Hao Wang
Cheng-Chi Chuang
ExaminesLUU, CHUONG A
Art Unit2898
Technology Center2800
Assignments
Taiwan Semiconductor Manufacturing Company
Current
Taiwan Semiconductor Manufacturing Company
Original
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