System with substrate carrier deterioration detection and repair | Patent Application Number 18170962

18170962
Not Appealed
Patent NumberUS 12162134 B2
Publication NumberUS 20230191619 A1
Filled DateFeb 17, 2023
Priority DateOct 26, 2017
Inventor/ApplicantsFu-Hsien Li
Jen-Ti Wang
Chih-Wei Lin
Cheng-Ho Hung
Yi-Ming Chen
ExaminesTRINH, MINH N
Art Unit3729
Technology Center3700
Assignments
Taiwan Semiconductor Manufacturing Company
Current
Taiwan Semiconductor Manufacturing Company
Original
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