Reducing substrate surface scratching using machine learning | Patent Application Number 18068469

18068469
Not Appealed
Patent NumberUS 11835927 B2
Publication NumberUS 20230121513 A1
Filled DateDec 19, 2022
Priority DateJun 28, 2021
Inventor/ApplicantsXinyuan Chong
Kartik B Shah
Weize Hu
Feng Chen
Satish Radhakrishnan
Karthikeyan Balaraman
Karthik Ramanathan
Michael Sterling Jackson
Mitrabhanu Sahu
Adolph Miller Allen
Wenjing Xu
Kartik B. Shah
ExaminesKWON, JOHN
Art Unit3747
Technology Center3700
Assignments
Applied Materials Israel
Current
Applied Materials IsraelApplied Materials Inc.
Original
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