Single Cell In-Die Metrology Targets and Measurement Methods | Patent Application Number 17941168

17941168
Not Appealed
Patent Number-
Publication NumberUS 20230005777 A1
Filled DateSep 9, 2022
Priority DateDec 3, 2018
Inventor/ApplicantsMark Ghinovker
ExaminesPHAM, HOA Q
Art Unit2877
Technology Center2800
Assignments
Kla Corporation
Current
Law Firm
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