Laser light source device and surface inspection apparatus using it | Patent Application Number 10668461

10668461
Not Appealed
Patent Number-
Publication NumberUS 20040095572 A1
Filled DateSep 23, 2003
Priority DateSep 23, 2003
Inventor/ApplicantsKazuhiro Miyakawa
Akihiko Sekine
Yoichiro Iwa
Hisashi Isozaki
ExaminesVANNUCCI, JAMES
Art Unit2828
Technology Center2800
Assignments
Kabushiki Kaisha Topcon
Current
Kabushiki Kaisha Topcon
Original
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