136b) in closer proximity to the first end 107 (i.e., the top end) of the workpiece processing tool 100 than the second end 109 (i.e., the bottom end) of the workpiece processing tool 100. The five horizontal airflow structures 136 include three intermediate horizontal airflow structures 136c, 136d, 136e that are between the lowermost first horizonal airflow structures 136a and the uppermost horizontal airflow structures 136b.

The first and second vertical airflow structures 134a, 134b have lower ends 138 and upper ends 140. The lower ends 138 are in closer proximity to the second end 109 of the workpiece processing tool 100 than the first end 107 of the workpiece processing tool 100, and the upper ends 140 are in closer proximity to the first end 107 of the workpiece processing tool 100 than the second end 109 of the workpiece processing tool 100. The lower ends 138 of the first and second vertical airflow structures 134a, 134b are in fluid communication with respective airflow dampers of the one or more airflow dampers 126 through respective fluid passageways 128 of the one or more fluid passageways 128. Air passes along the respective fluid passageways 128 to the lower ends 138 of the first and second vertical airflow structures 134a, 134b. The air continues upward and along the first and second vertical airflow structures 134a, 134b as represented by the arrows 142 towards upper ends 140 of the first and second vertical airflow structures 134a, 134b. The first and second vertical airflow structures 134a, 134b are in fluid communication with the five horizontal airflow structures 136a, 136b, 136c, 136d, 136e. As the air moves upward and along the first and second vertical airflow structures 134a, 134b, the air passes into the five horizontal airflow structures 136a, 136b, 136c, 136d, 136e and into the first region 114 of the process block 106. As the air is ejected or expelled from the five horizontal airflow structures 136a, 136b, 136c, 136d, 136e through one or more airflow openings, holes, or outlets 146 in each of the five horizontal airflow structures 136a, 136b, 136c, 136d, 136e, the air is directed in an airflow direction as represented by the arrows 148. The one or more airflow openings 146 are directed downwards such that the airflow direction as represented by the arrows 148 is directed away from the first end 107 of the workpiece processing tool 100 towards the second end 109 of the workpiece processing tool 100. In other words, the airflow direction represented by the arrows 162 is directed in a downward direction.

As shown in the middle or center image in FIG. 1C, the second air flow system or assembly 122 includes one or more vertical airflow structures 150 and one or more horizontal airflow structures 152 that are transverse, perpendicular, orthogonal, or at a non-zero angle to the one or more vertical airflow structures 150. The one or more vertical airflow structures 150 are in fluid communication with the one or more horizontal airflow structures 152. As shown in FIG. 1C, in this embodiment of the process block 106, the one or more vertical airflow structures 150 includes a pair of vertical airflow structures 150a, 150b having a first vertical airflow structure 150a and a second vertical airflow structure 150b that are spaced apart from each other and opposite to each other about the one or more horizontal airflow structures 152. As shown in FIG. 1C, in this embodiment of the process block 106, the one or more horizontal airflow structures 152 includes a plurality of horizontal airflow structures 152. In this embodiment of the process block 106, the plurality of horizontal airflow structures 152 includes four horizontal airflow structures 152 (i.e., first, second, third, and fourth horizontal airflow structures). The four horizontal airflow structures 152 include a lowermost horizontal airflow structure 152a (i.e., a first horizontal airflow structure 152a) in closer proximity to the second end 109 (i.e., the bottom end) of the workpiece processing tool 100 than the first end 107 (i.e., the top end) of the workpiece processing tool 100. The four horizontal airflow structures 152 include an uppermost horizontal airflow structure 152b (i.e., a second horizontal airflow structure 136b) in closer proximity to the first end 107 (i.e., the top end) of the workpiece processing tool 100 than the second end 109 (i.e., the bottom end) of the workpiece processing tool 100. The four horizontal airflow structures 152 include two intermediate horizontal airflow structures 152c, 152d that are between the lowermost horizonal airflow structure 152a and the uppermost horizontal airflow structures 152b.

The first and second vertical airflow structures 150a, 150b have lower ends 154 and upper ends 156. The lower ends 154 are in closer proximity to the second end 109 of the workpiece processing tool 100 than the first end 107 of the workpiece processing tool 100, and the upper ends 156 are in closer proximity to the first end 107 of the workpiece processing tool 100 than the second end 109 of the workpiece processing tool 100. The lower ends 154 of the first and second vertical airflow structures 150a, 150b are in fluid communication with respective airflow dampers of the one or more airflow dampers 126 through respective fluid passageways 128 of the one or more fluid passageways 128. Air passes along the respective fluid passageways 128 to the lower ends 154 of the first and second vertical airflow structures 150a, 150b. The air continues upward and along the first and second vertical airflow structures 150a, 150b as represented by the arrows 158 towards upper ends 156 of the first and second vertical airflow structures 150a, 150b. The first and second vertical airflow structures 150a, 150b are in fluid communication with the four horizontal airflow structures 152a, 152b, 152c, 152d. As the air moves upward and along the first and second vertical airflow structures 150a, 150b, the air passes into the four horizontal airflow structures 152a, 152b, 152c, 152d and into the second region 116 of the process block 106. As the air is ejected or expelled from the four horizontal airflow structures 152a, 152b, 152c, 152d through one or more airflow openings, holes, or outlets 160 in each of the four horizontal airflow structures 152a, 152b, 152c, 152d, the air is directed in an airflow direction as represented by the arrows 162. The one or more airflow openings 160 are directed downwards such that the airflow direction as represented by the arrows 162 is directed away from the first end 107 of the workpiece processing tool 100 towards the second end 109 of the workpiece processing tool 100. In other words, the airflow direction represented by the arrows 162 is directed in a downward direction.

In this embodiment, one or more airflow control structures 164 are present within the first and second vertical airflow structures 150a, 150b. The one or more airflow control structures 164 may be configured to, in operation, further control the airflow passing into and through the first and second vertical airflow structures 150a, 150b, respectively.

As shown in the right-hand most image in FIG. 1C, the third air flow system or assembly 124 includes one or more vertical airflow structures 166 and one or more horizontal airflow structures 168 that are transverse, perpendicular, orthogonal, or at a non-zero angle to the one or more vertical airflow structures 166. The one or more vertical airflow structures 166 are in fluid communication with the one or more horizontal airflow structures 168. As shown in FIG. 1C, in this embodiment of the process block 106, the one or more vertical airflow structures 166 includes a pair of vertical airflow structures 166a, 166b having a first vertical airflow structure 166a and a second vertical airflow structure 166b that are spaced apart from each other. As shown in FIG. 1C, in this embodiment of the process block 106, the one or more horizontal airflow structures 168 includes a plurality of horizontal airflow structures 168. In this embodiment of the process block 106, the plurality of horizontal airflow structures 168 includes four horizontal airflow structures 168a, 168b, 168c, 168d (i.e., first, second, third, and fourth horizontal airflow structures). The four horizontal airflow structures 168a, 168b, 168c, 168d include two lowermost horizontal airflow structures 168a, 168b (i.e., a first and second horizontal airflow structure 168a, 168b) in closer proximity to the second end 109 (i.e., the bottom end) of the workpiece processing tool 100 than the first end 107 (i.e., the top end) of the workpiece processing tool 100. The two lowermost horizontal airflow structures 168a, 168b are spaced apart from each other. The four horizontal airflow structures 168 include two uppermost horizontal airflow structures 168c, 168d (i.e., a third and fourth horizontal airflow structure 136b) in closer proximity to the first end 107 (i.e., the top end) of the workpiece processing tool 100 than the second end 109 (i.e., the bottom end) of the workpiece processing tool 100. The two uppermost airflow structures 168c, 168d are spaced apart from each other.

The first and second vertical airflow structures 166a, 166b have lower ends 170 and upper ends 172. The lower ends 170 are in closer proximity to the second end 109 of the workpiece processing tool 100 than the first end 107 of the workpiece processing tool 100, and the upper ends 172 are in closer proximity to the first end 107 of the workpiece processing tool 100 than the second end 109 of the workpiece processing tool 100. The lower ends 170 of the first and second vertical airflow structures 166a, 166b are in fluid communication with respective airflow dampers of the one or more airflow dampers 126 through a respective fluid passageway 128 of the one or more fluid passageways 128. Air passes along the respective fluid passageway 128 to the lower ends 170 of the first and second vertical airflow structures 166a, 166b. The air continues upward and along the first and second vertical airflow structures 166a, 166b as represented by the arrows 174 towards upper ends 156 of the first and second vertical airflow structures 166a, 166b. The first and second vertical airflow structures 166a, 166b are in fluid communication with the four horizontal airflow structures 168a, 168b, 168c, 168d. As the air moves upward and along the first and second vertical airflow structures 166a, 166b, the air passes into the four horizontal airflow structures 168a, 168b, 168c, 168d and into the third region 118 of the process block 106. As the air is ejected or expelled from the four horizontal airflow structures 168a, 168b, 168c, 168d through one or more airflow openings, holes, or outlets 176 in each of the four horizontal airflow structures 168a, 168b, 168c, 168d, the air is directed in an airflow direction as represented by the arrows 178. The one or more airflow openings 160 are directed downwards such that the airflow direction as represented by the arrows 178 is directed away from the first end 107 of the workpiece processing tool 100 towards the second end 109 of the workpiece processing tool 100. In other words, the airflow direction represented by the arrows 178 is directed in a downward direction.

In this embodiment, the third airflow system or assembly 124 includes an airflow head 180, which is in fluid communication with at least one of the one or more vertical airflow structures 166 or the one or more horizontal airflow structures 168. The airflow head 180 includes one or more airflow openings, holes, or outlets 182 that eject or expel air into the third region 118 in an airflow direction as represented by arrows 184.

The respective vertical airflow structures 134, 150, 166 along with the horizontal airflow structures 136, 152, 168 of the first, second, and third airflow assemblies or systems 120, 122, 124 define one or more airflow pathways through which air readily passes from the source of air and into the first, second, and third regions 114, 116, 118, respectively.

As set forth earlier herein, the first, second, and third airflow systems or assemblies 120, 122, 124 are generally provided with a continuous fixed volume of air from the source of air 130 through the one or more airflow dampers 126 and the one or more fluid passageways 128. The workpiece processing tool 100 takes a relatively large amount of power to run such that operating costs of the workpiece processing tool 100 are relatively high. In view of this above discussion with respect to the workpiece processing tool 100, the present disclosure is directed to providing one or more embodiments of a workpiece processing tool that allows for the particles or pollutants to be expelled from a process block and has better power efficiency relative to the workpiece processing tool 100.

FIG. 2A is a perspective view of a workpiece processing tool 200, in accordance with some embodiments. The workpiece processing tool 200 is similar to the workpiece processing tool 100. Similar to the workpiece processing tool 100 as shown in FIG. 1A, the workpiece processing tool 200 as shown in FIG. 2A includes carrier station base 102, the multipurpose block 104, the interface block sub 108, and the process block 202, which is between the multipurpose block 104 and the interface block 108 like the process block 106 of the workpiece processing tool 100. The process block 202 is the same or similar to the process block 106. However, the process block 202 of the workpiece processing tool 200 includes or contains additional and different features that are not present within the process block 106 of the workpiece processing tool 100. The following discussion of the process block 202 of the workpiece processing tool 200 will focus on the additional and different features of the process block 202 relative to the process block. The same or similar features of the process block 106 and the process block 202 will be provided with the same or similar reference numerals. For the sake of simplicity and brevity of the present disclosure, details of these same or similar details between these same or similar features of the process block 106 and the process block 202 may not be reproduced here if already discussed in detail as set forth earlier herein with respect to describing the process block 106 as shown in FIGS. 1A-1C.

FIG. 2B is a schematic block diagram of a workpiece processing tool 200 with one or more airflow systems or assemblies, in accordance with some embodiments. Unlike the process block 106 of the workpiece processing tool 100, the process block 202 of the workpiece processing tool 200 includes one or more first particle or pollutant sensors 204, one or more second particle or pollutant sensors 206, and one or more third particle or pollutant sensors 208. Unlike the process block 106 of the workpiece processing tool 100, the process block 202 of the workpiece processing tool 200 includes a first fan 210, a second fan 212, and a third fan 214.

The one or more first particle sensors 204 are in the first region 114, the one or more second particle sensors 206 are in the second region 116, and the one or more third particle sensors 208 are in the third region 118. The one or more first particle sensors 204, the one or more second particle sensors 206, and the one or more third particle sensors 208 are configured to, in operation, measure a level of particles or pollutants within a corresponding region of the first, second, and third regions 114, 116, 118, respectively, in real time.

Similar to the process block 106, the processor 132 of the process block 202 is in electrical communication with one or more airflow dampers 126. However, unlike the process block 106, the processor 132 of the process block 202 is also in electrical communication with the one or more first particle sensors 204, the one or more second particle sensors 206, and the one or more third particle sensors 208, and the processor 132 of the process block 202 is also in electrical communication with the first fan 210, the second fan 212, and the third fan 214. The processor 132 is configured to receive signals from and send signals to these respective components to control airflow through the first region the process block 106. In some other embodiments, the process block 106 includes multiple ones of the processor 132 and the multiple ones of the processors 132 are in electrical communication with a control hub that is configured to, in operation, collect signals from and send signals to ones of the processors 132 to control the workpiece processing tool 200 and the process block 202 of the workpiece processing tool 200.

The one or more first particle sensors 204 measure a level of particles or pollutants within the first region 114. The one or more first particle sensors 204 send one or more signals to the processor 132, and the processor 132, which may be or may include a microprocessor, receives the one or more signals from the one or more first particle sensors 204 and processes those signals. If the processor 132 determines, based on processing the one or more signals from the one or more first particle sensors 204, that the level of particles or pollutants within the first region 114 is greater than a selected threshold, the processor 132 outputs a signal to the first fan 210 to activate the first fan 210 or to speed up the first fan 210 to further facilitate and increase the airflow through the first region 114. Similarly, if the processor 132 determines, based on processing the one or more signals from the one or more first particle sensors 204, that the level of particles or pollutants within the first region 114 is greater than a selected threshold, the processor 132 outputs a signal to at least one of the respective airflow dampers of the one or more airflow dampers 126 to further facilitate and increase the airflow through the first airflow system or assembly 120, increasing the airflow through the first region 114. In some situations, the processor 132 may send a signal to only one of the first airflow system or assembly 120 or the first fan 210 to increase the airflow within the first region 114, or, in some situations, the processor 132 may send signals to both the first airflow system or assembly 120 and the first fan 210 to increase the airflow within the first region 114. By increasing the airflow within the first region 114, the excess particles or pollutants are more rapidly and efficiently expelled from the first region 114, bringing the level of the particles and pollutants within the first region 114 below the selected threshold.

Once the level of particles or pollutants within the first region 114 is below the selected threshold, the processor 132 outputs a signal to the first fan 210 to slow down or deactivate the first fan 210 to conserve energy. Once the level of particles or pollutants within the first region 114 is below the selected threshold, the processor 132 outputs at least one signal to at least one airflow damper of the one or more airflow dampers 126 to reduce the airflow through the first airflow system or assembly 120. In some situations, the processor 132 sends a signal to only one of the first fan 210 or to the at least one airflow damper of the one or more airflow dampers 126.

The one or more second particle sensors 206 measure a level of particles or pollutants within the second region 116. The one or more second particle sensors 206 send one or more signals to the processor 132, and the processor 132, which may be or may include a microprocessor, receives the one or more signals from the one or more second particle sensors 206 and processes those signals. If the processor 132 determines, based on processing the one or more signals from the one or more second particle sensors 206, that the level of particles or pollutants within the second region 116 is greater than a selected threshold, the processor 132 outputs a signal to the second fan 212 to activate the second fan 212 or to speed up the second fan 212 to further facilitate and increase the airflow through the second region 116. Similarly, if the processor 132 determines, based on processing the one or more signals from the one or more second particle sensors 206, that the level of particles or pollutants within the second region 116 is greater than a selected threshold, the processor 132 outputs a signal to at least one of the respective airflow dampers of the one or more airflow dampers 126 to further facilitate and increase the airflow through the second airflow system or assembly 122, increasing the airflow through the second region 116. In some situations, the processor 132 may send a signal to only one of the second airflow system or assembly 122 or the second fan 212 to increase the airflow within the second region 116, or, in some situations, the processor 132 may send signals to both the second airflow system or assembly 122 and the second fan 212 to increase the airflow within the second region 116. By increasing the airflow within the first region 114, the excess particles or pollutants are more rapidly and efficiently expelled from the first region, bringing the level of the particles and pollutants within the first region below the selected threshold. By increasing the airflow within the second region 116, the excess particles or pollutants are more rapidly and efficiently expelled from the second region 116, bringing the level of the particles and pollutants within the second region 116 below the selected threshold.

Once the level of particles or pollutants within the second region 116 is below the selected threshold, the processor 132 outputs a signal to the second fan 212 to slow down or deactivate the second fan 212 to conserve energy. Once the level of particles or pollutants within the second region 116 is below the selected threshold, the processor 132 outputs at least one signal to at least one airflow damper of the one or more airflow dampers 126 to reduce the airflow through the second airflow system or assembly 122. In some situations, the processor 132 sends a signal to only one of the second fan 212 or to the at least one airflow damper of the one or more airflow dampers 126.

The one or more third particle sensors 208 measure a level of particles or pollutants within the third region 118. The one or more third particle sensors 208 send one or more signals to the processor 132, and the processor 132, which may be or may include a microprocessor, receives the one or more signals from the one or more third particle sensors 208 and processes those signals. If the processor 132 determines, based on processing the one or more signals from the one or more third particle sensors 208, that the level of particles or pollutants within the third region 118 is greater than a selected threshold, the processor 132 outputs a signal to the third fan 214 to activate the third fan 214 or to speed up the third fan 214 to further facilitate and increase the airflow through the third region 118. Similarly, if the processor 132 determines, based on processing the one or more signals from the one or more third particle sensors 208, that the level of particles or pollutants within the third region 118 is greater than a selected threshold, the processor 132 outputs a signal to at least one of the respective airflow dampers of the one or more airflow dampers 126 to further facilitate and increase the airflow through the third airflow system or assembly 124, increasing the airflow through the third region 118. In some situations, the processor 132 may send a signal to only one of the third airflow system or assembly 124 or the third fan 214 to increase the airflow within the third region 118, or, in some situations, the processor 132 may send signals to both the third airflow system or assembly 124 and the third fan 214 to increase the airflow within the third region 118. By increasing the airflow within the third region 118, the excess particles or pollutants are more rapidly and efficiently expelled from the third region 118, bringing the level of the particles and pollutants within the third region 118 below the selected threshold.

Once the level of particles or pollutants within the third region 118 is below the selected threshold, the processor 132 outputs a signal to the third fan 214 to slow down or deactivate the third fan 214 to conserve energy. Once the level of particles or pollutants within the second region 116 is below the selected threshold, the processor 132 outputs at least one signal to at least one airflow damper of the one or more airflow dampers 126 to reduce the airflow through the third airflow system or assembly 124. In some situations, the processor 132 sends a signal to only one of the third fan 214 or to the at least one airflow damper of the one or more airflow dampers 126.

FIG. 2B is a schematic view of the first, second, and third airflow systems or assemblies 120, 122, 124 and the one or more first, second, and third particle sensors 204, 206, 208 within the process block 202 of the workpiece processing tool 200 as shown in FIG. 2A, in accordance with some embodiments. As process block 202 of the workpiece processing tool 200 includes several of the same or similar features as the process block 106 of the workpiece processing tool 100, these same or similar features between the process block 202 of the workpiece processing tool 200 and the process block 106 of the workpiece processing tool 100 are provided with the same or similar reference numerals in the workpiece processing tool as shown in FIG. 2B. However, unlike the process block 106, the process block 202 contains additional and different features, and, therefore, the following discussion will focus on these additional and different features. For the sake of simplicity and brevity of the present disclosure, the details of the same or similar features between the process block 202 and the process block 106 may not be reproduced herein.

The one or more first particle sensors 204 is a plurality of first particle sensors 204 that are within the first region 114. There are two of the first particle sensors 204 between adjacent pairs of the one or more horizontal airflow structures 136. As discussed earlier herein, the one or more first particle sensors 204 measure the level of particles or pollutants within the first region 114. As there are two of the first particle sensors 204 between each adjacent pair of the horizontal airflow structures 136, there are a total of ten of the one or more first particle sensors 204. In an alternative embodiment, there may be a different number of the one or more first particle sensors 204 between each adjacent pair of the one or more horizontal airflow structures 136 such that there are more than ten or less than ten of the one or more first particle sensors 204. In an alternative embodiment, there may be at least one additional first particle sensor 204 below the lowest horizontal airflow structure 136 such that there are twelve of the one or more first particle sensors 204. In other words, the number and placement of the one or more first particle sensors 204 may be adapted or changed depending on the process that the process block 202 of the workpiece processing tool 200 is to perform.

The one or more second particle sensors 206 is a plurality of second particle sensors 206 that are within the second region 116. There are two of the second particle sensors 206 between adjacent pairs of the one or more horizontal airflow structures 152, and there are two second particle sensors 206 below the lowest horizontal airflow structure 152a. As discussed earlier herein, the one or more second particle sensors 206 measure the level of particles or pollutants within the second region 116. As there are two of the second particle sensors 206 between each adjacent pair of the horizontal airflow structures 152 and two below the lowest horizontal airflow structure 152a, there are a total of eight of the one or more second particle sensors 206. In an alternative embodiment, there may be none of the one or more second particle sensors below the lowest horizontal airflow structure 152a such that there is a total of six of the one or more second particle sensors 206. In other words, the number and placement of the one or more second particle sensors 206 may be adapted or changed depending on the process that the process block 202 of the workpiece processing tool 200 is to perform.

The one or more third particle sensors 208 is a plurality of third particle sensors 208 that are within the third region 118. There are two of the one or more third particle sensors 208 laterally adjacent to the two uppermost horizontal airflow structures 168c, 168d and there are two of the one or more third particle sensors 208 laterally adjacent to the two lowermost horizontal airflow structures 168a, 168b. As discussed earlier herein, the one or more third particle sensors 208 measure the level of particles or pollutants within the third region 118. As there are two of the one or more third particle sensors 208 laterally adjacent to the uppermost horizontal airflow structures 168c, 168d and two of the one or more third particle sensors 208 are laterally adjacent to the two lowermost horizontal airflow structures 168a, 168b, there is a total of four of the one or more third particle sensors 208. In an alternative embodiment, the number and placement of the one or more third particle sensors 208 may be adapted or changed depending on the process that the process block 202 of the workpiece processing tool 200 is to perform.

The first fan 210 is in closer proximity to the second end 109 (i.e., the bottom end) of the workpiece processing tool 200 than the first end 107 (i.e., the top end) of the workpiece processing tool 200. The first fan 210 is positioned in closer proximity to the second end 109 instead of the first end 107 to further facilitate or increase the airflow in the airflow direction as represented by the arrows 148 in the first region 114.

The second fan 212 is in closer proximity to the second end 109 (i.e., the bottom end) of the workpiece processing tool 200 than the first end 107 (i.e., the top end) of the workpiece processing tool 200. The second fan 212 is positioned in closer proximity to the second end 109 instead of the first end 107 to further facilitate or increase the airflow in the airflow direction as represented by the arrows 162 in the second region 116.

The third fan 214 is in closer proximity to the second end 109 (i.e., the bottom end) of the workpiece processing tool 200 than the first end 107 (i.e., the top end) of the workpiece processing tool 200. The third fan 214 is positioned in closer proximity to the second end 109 instead of the first end 107 to further facilitate or increase the airflow in the airflow direction as represented by the arrows 178 in the third region 118.

FIG. 3 is a flowchart 300 of a method of operating the first, second, and third air systems 120, 122, 124 of the process block 202 as shown in FIG. 2A, in accordance with some embodiments. The flowchart 300 includes a first step 302, a second step 304, a third step 306, a fourth step 308, a fifth step 310, and a sixth step 312.

In the first step 302, the one or more first particle sensors 204, the one or more second particle sensors 206, and the one or more third particle sensors 208 continuously and in real time monitor a level of particles or pollutants within the first region 114, the second region 116, and the third region 118, respectively. For example, in at least one embodiment, the one or more first, second, and third particle detectors 204, 206, 208 are electrical particle or pollutant sensors that utilize a voltage or current to detect the level of particles or pollutants within the first, second, and third regions 114, 116, 118, respectively.

In the second step 304, the one or more first, second, and third particle sensors 204, 206, 208 send one or more electrical signals to the processor 132 representative of the level of particles or pollutants within the first, second, and third regions 114, 116, 118, respectively. The processor 132 receives these one or more electrical signals from the one or more first, second, and third particle sensors 204, 206, 208.

In the third step 306, the processor 132 processes the one or more electrical signals received from the one or more first, second, and third particle sensors 204, 206, 208. For example, the processor 132 processes these one or more electrical signals to determine a first level of particles or pollutants in the first region 114, a second level of particles or pollutants within the second region 116, and a third level of particles or pollutants within the third region 118.

In a fourth step 308, after the processor 132 has received the one or more electrical signals in the second step 304 and has processed the one or more electrical signals in the third step 306, the processor 132 compares the first, second, and third levels of particles or pollutants to one or more selected thresholds. For example, the first level of particles or pollutants within the first region 114 as determined by the processor 132 is compared to a first selected threshold by the processor 132, the second level of particles or pollutants within the second region 116 as determined by the processor 132 is compared to a second selected threshold by the processor 132, and the third level of particles or pollutants within the third region 118 as determined by the processor 132 is compared to a third selected threshold by the processor