INCORPORATION BY REFERENCE

The present application is a Continuation-In-Part application of PCT/JP2021/004748, filed Feb. 9, 2021, the entire contents of which are incorporated herein by reference.

BACKGROUND OF THE INVENTION
Field of the Invention

The present invention relates to a semiconductor memory apparatus using semiconductor devices.

Description of the Related Art

In recent years, a higher degree of integration and higher performance of memory devices have been demanded in the development of the LSI (Large Scale Integration) technology.

In a common planar MOS transistor, a channel extends in the horizontal direction along the upper surface of a semiconductor substrate. In contrast, a channel of a SGT extends in a direction perpendicular to the upper surface of a semiconductor substrate (for example, see Japanese Patent Laid-Open No. 2-188966 Japanese Patent Laid-Open No. 2-188966 and Hiroshi Takato, Kazumasa Sunouchi, Naoko Okabe, Akihiro Nitayama, Katsuhiko Hieda, Fumio Horiguchi, and Fujio Masuoka: IEEE Transaction on Electron Devices, Vol. 38, No. 3, pp. 573-578 (1991)). Therefore, when SGTs are used, the density of a semiconductor apparatus can be increased more than when planar MOS transistors are used. Using such SGTs as selection transistors can achieve a high degree of integration of, for example, DRAM (Dynamic Random Access Memory) with a capacitor connected thereto (for example, see H. Chung, H. Kim, H. Kim, K. Kim, S. Kim, K. Dong, J. Kim, Y. C. Oh, Y. Hwang, H. Hong, G. Jin, and C. Chung: “4F2 DRAM Cell with Vertical Pillar Transistor (VPT),” 2011 Proceeding of the European Solid-State Device Research Conference, (2011)), PCM (Phase Change Memory) with a variable resistance element connected thereto (for example, see H. S. Philip Wong, S. Raoux, S. Kim, Jiale Liang, J. R. Reifenberg, B. Rajendran, M. Asheghi and K. E. Goodson: “Phase Change Memory,” Proceeding of IEEE, Vol. 98, No 12, December, pp. 2201-2227 (2010)), RRAM (Resistive Random Access Memory; for example, see T. Tsunoda, K. Kinoshita, H. Noshiro, Y. Yamazaki, T. Iizuka, Y. Ito, A. Takahashi, A. Okano, Y. Sato, T. Fukano, M. Aoki, and Y. Sugiyama: “Low Power and High Speed Switching of Ti-doped NiO ReRAM under the Unipolar Voltage Source of less than 3 V,” IEDM (2007)), and MRAM (Magneto-resistive Random Access Memory) whose resistance is changed by changing the direction of a magnetic spin using a current (for example, see W. Kang, L. Zhang, J. Klein, Y. Zhang, D. Ravelosona, and W. Zhao: “Reconfigurable Codesign of STT-MRAM Under Process Variations in Deeply Scaled Technology,” IEEE Transaction on Electron Devices, pp. 1-9(2015)). There is also known a capacitorless DRAM memory cell including a single MOS transistor (see J. Wan, L. Rojer, A. Zaslavsky, and S. Critoloveanu: “A Compact Capacitor-Less High-Speed DRAM Using Field Effect-Controlled Charge Regeneration,” Electron Device Letters, Vol. 35, No. 2, pp. 179-181 (2012)), for example. The present application relates to dynamic flash memory that can be formed with only a MOS transistor and without a variable resistance element or a capacitor.

FIGS. 6A, 6B, 6C and 6D illustrate a write operation for the aforementioned capacitorless DRAM memory cell including a single MOS transistor, FIGS. 7A and 7B illustrate problems with the operation thereof, and FIGS. 8A, 8B and 8C illustrate a read operation (see J. Wan, L. Rojer, A. Zaslavsky, and S. Critoloveanu: “A Compact Capacitor-Less High-Speed DRAM Using Field Effect-Controlled Charge Regeneration,” Electron Device Letters, Vol. 35, No. 2, pp. 179-181 (2012), T. Ohsawa, K. Fujita, T. Higashi, Y. Iwata, T. Kajiyama, Y. Asao, and K. Sunouchi: “Memory design using a one-transistor gain cell on SOI,” IEEE JSSC, vol. 37, No. 11, pp 1510-1522 (2002), T. Shino, N. Kusunoki, T. Higashi, T. Ohsawa, K. Fujita, K. Hatsuda, N. Ikumi, F. Matsuoka, Y. Kajitani, R. Fukuda, Y. Watanabe, Y. Minami, A. Sakamoto, J. Nishimura, H. Nakajima, M. Morikado, K. Inoh, T. Hamamoto, A. Nitayama: “Floating Body RAM Technology and its Scalability to 32 nm Node and Beyond,” IEEE IEDM (2006), and E. Yoshida: “A Capacitorless 1T-DRAM Technology Using Gate-induced Drain-Leakage (GIDL) Current for Low-power and High-speed Embedded Memory,” IEEE IEDM (2006)). FIG. 6A illustrates a “1” written state. Herein, the memory cell includes a source N⁺ layer 103 (hereinafter, a semiconductor region containing a high concentration of donor impurities shall be referred to as an “N⁺ layer”) connecting to a source line SL and a drain N⁺ layer 104 connecting to a bit line BL, each formed in a SOI substrate 100; a gate conductive layer 105 connecting to a word line WL; and a floating body 102 of a MOS transistor 110. The DRAM memory cell does not include a capacitor, and is formed with a single MOS transistor 110. It should be noted that the floating body 102 is in contact with a SiO₂layer 101 of the SOI substrate immediately below the floating body 102. When “1” is written to such a memory cell including a single MOS transistor 110, the MOS transistor 110 is operated in the saturation region. That is, a channel 107 for electrons extending from the source N⁺ layer 103 has a pinch-off point 108, and thus does not reach the drain N⁺ layer 104 connecting to the bit line. When the MOS transistor 110 is operated while each of the bit line BL connected to the drain N⁺ layer and the word line WL connected to the gate conductive layer 105 is set at a high voltage and the gate voltage is set at a level of about ½ that of the drain voltage, the intensity of an electric field becomes maximum at the pinch-off point 108 around the drain N⁺ layer 104. Consequently, accelerated electrons flowing from the source N⁺ layer 103 to the drain N⁺ layer 104 collide with Si lattices, and electron-hole pairs are generated due to the kinetic energy lost during the collision (i.e., an impact ionization phenomenon). Most of the generated electrons (not illustrated) reach the drain N⁺ layer 104. Meanwhile, only some of the electrons that are very hot reach the gate conductive layer 105 beyond a gate oxide film 109. In addition, holes 106 generated at the same time charge the floating body 102. In such a case, since the floating body 102 is p-type Si, the generated holes contribute to increasing the majority carriers. When the floating body 102 is filled with the generated holes 106 and the voltage of the floating body 102 becomes higher than that of the source N⁺ layer 103, specifically, Vb or greater, the generated holes are further released to the source N⁺ layer 103. Herein, Vb is the built-in voltage of a P-N junction between the source N⁺layer 103 and the P-layer 6 floating body 102, and is about 0.7 V. FIG. 6B illustrates a view in which the floating body 102 is saturated with and charged with the generated holes 106.

Next, an operation of writing “0” to the memory cell 110 will be described with reference to FIG. 6C. With respect to a common selected word line WL, there randomly exist memory cells 110 to which “1” is written and memory cells 110 to which “0” is written. FIG. 6C illustrates a view in which the state of the memory cell 110 changes from the “1” written state to the “0” written state. When “0” is written, the bit line BL is set at a negative bias voltage so that a P-N junction between the drain N⁺ layer 104 and the floating body 102 as the P-layer is forward-biased. Consequently, the holes 106, which have been generated in the floating body 102 in advance in the previous cycle, flow to the drain N⁺ layer 104 connected to the bit line BL. When the write operation is complete, two states of the memory cells are obtained that include the memory cells 110 filled with the generated holes 106 (FIG. 6B) and the memory cells 110 from which the generated holes have been discharged (FIG. 6C). The potential of the floating body 102 in the memory cell 110 filled with the holes 106 is higher than that of the floating body 102 without holes generated therein. Thus, the threshold voltage of the memory cell 110 to which “1” is written is lower than the threshold voltage of the memory cell 110 to which “0” is written. FIG. 6D illustrates such a state.

Next, problems with the operation of such a memory cell including a single MOS transistor 110 will be described with reference to FIGS. 7A and 7B. As illustrated in FIG. 7A, the capacitance C_FBof the floating body is equal to the sum of the capacitance C_WLbetween the gate connecting to the word line and the floating body, the junction capacitance C_SLof the P-N junction between the source N⁺ layer 103 connecting to the source line and the floating body 102, and the junction capacitance C_BLof the P-N junction between the drain N⁺ layer 104 connecting to the bit line and the floating body 102, and is represented as follows.

C_FB=C_WL+C_BL+C_SL (10)

In addition, the capacitive coupling ratio βW_Lbetween the gate connecting to the word line and the floating body is represented as follows.

β_WL=C_WL/(C_WL+C_BL+C_SL) (11)

Thus, when the voltage V_WLof the word line oscillates during reading or writing, the voltage of the floating body 102 as a storage node (i.e., a node) of the memory cell is also influenced. FIG. 7B illustrates such a state. When the voltage V_WLof the word line changes from 0 V to V_WLHduring reading or writing, the voltage V_FBof the floating body 102 rises from the voltage V_FB1in the initial state before the voltage of the word line has changed to V_FB2due to capacitive coupling with the word line. The amount of change in the voltage ΔV_FBis represented as follows.

Δ
⁢

V
FB

=

V

FB
⁢
2

-

V

FB
⁢
1

=

β
WL

×

V
WLH

(
12
)

Herein, regarding β_WLin Expression (11), the contribution rate of C_WLis large, and, for example, C_WL:C_BL:C_SL=8:1:1. In such a case, β_WL=0.8. When the voltage of the word line has changed from 5 V during writing to 0 V at the completion of the writing, for example, the floating body 102 receives oscillation noise with 5 V×β_WL=4 V due to the capacitive coupling between the word line WL and the floating body 102. Therefore, there has been a problem in that a sufficient margin cannot be provided for the potential difference between the potentials of the floating body 102 when “1” is written thereto and “0” is written thereto.

FIGS. 8A, 8B and 8C illustrate a read operation; specifically, FIG. 8A illustrates a “1” written state and FIG. 8B illustrates a “0” written state. However, in practice, even when Vb has been written to the floating body 102 during writing of “1,” the floating body 102 is negative-biased once the voltage of the word line returns to 0 V at the completion of the writing. When “0” is written, the floating body 102 is negative-biased further deeply. Thus, as illustrated in FIG. 8C, it would be impossible to provide a sufficient margin for the potential difference between when “1” is written and when “0” is written. Thus, it has been practically difficult to commercialize capacitorless DRAM memory cells.

SUMMARY OF THE INVENTION
Technical Problem

A capacitorless single-transistor DRAM (i.e., a gain cell) involves strong capacitive coupling between a word line and a floating body, and thus has a problem in that when the potential of the word line is oscillated during data reading or data writing, the oscillation is directly transmitted as noise to the floating body. Consequently, problems, such as erroneous reading and erroneous rewriting of memory data, occur, making it difficult to put the capacitorless single-transistor DRAM (i.e., the gain cell) into practical use.

Solution to the Problem

To solve the foregoing problems, a memory apparatus using semiconductor devices of the present invention includes a block including a plurality of memory cells arranged in a matrix on a substrate, the block including a page formed by memory cells arranged in a column among the plurality of memory cells, in which each memory cell included in the page has a semiconductor base material provided on the substrate in a manner standing in an upright position along a vertical direction or extending in a horizontal direction with respect to the substrate, a first impurity region and a second impurity region at opposite ends of the semiconductor base material, a gate insulating layer in contact with a side face of the semiconductor base material between the first impurity region and the second impurity region, a first gate conductor layer partially or entirely covering the gate insulating layer, and a second gate conductor layer adjacent to the first gate conductor layer and in contact with a side face of the gate insulating layer, in each of the individual memory cells, each of voltages applied to the first gate conductor layer, the second gate conductor layer, the first impurity region, and the second impurity region is controlled to allow holes generated through an impact ionization phenomenon or using a gate induced drain leakage current to be retained in the semiconductor base material, during a page write operation, a voltage of the semiconductor base material is set to a first data holding voltage that is higher than one or both of a voltage of the first impurity region and a voltage of the second impurity region, and during a page erase operation, each of voltages applied to the first impurity region, the second impurity region, the first gate conductor layer, and the second gate conductor layer is controlled to allow the holes to be pulled out through one or both of the first impurity region and the second impurity region, and then, the voltage of the semiconductor base material is set to a second data holding voltage lower than the first data holding voltage, the first impurity region in each of the memory cells connects to a source line, the second impurity region connects to a bit line, one of the first gate conductor layer and the second gate conductor layer connects to a word line, and another of the first gate conductor layer and the second gate conductor layer connects to a first drive control line, the bit line connects to a sense amplifier circuit via a first switch circuit, and during the page erase operation, page data for the page write operation is input to the sense amplifier circuit (first invention).

In the foregoing first invention, during the page erase operation, the first switch circuit is turned off to non-conductive state, and the page data is input to the sense amplifier circuit (second invention).

In the foregoing first invention, during the page erase operation, the first switch circuit is turned off to non-conductive state, and the page data is input to the sense amplifier circuit, and when the page erase operation is complete, the first switch circuit is turned on to conductive state, and the page write operation is performed (third invention).

In the foregoing first invention, during the page erase operation, the voltage of the semiconductor base material in each of the memory cells in the page is set to the second data holding voltage (fourth invention).

In the foregoing first invention, during the page write operation, the voltage of the semiconductor base material in each of the memory cells in the page is set to the first data holding voltage (fifth invention).

In the foregoing first invention, during the page erase operation, the first switch circuit is turned off to non-conductive state, and the page data stored in the sense amplifier circuit is read (sixth invention).

In the foregoing sixth invention, the page data stored in the sense amplifier circuit is memory data read from a memory cell before the page erase operation is started (seventh invention).

In the foregoing first invention, a first gate capacitance between the first gate conductor layer and the semiconductor base material is set larger than a second gate capacitance between the second gate conductor layer and the semiconductor base material (eighth invention).

In the foregoing first invention, during the page erase operation, the holes are removed from the semiconductor base material through the second impurity region, and the first impurity region is set to a floating state (ninth invention).

In the foregoing first invention, during the page erase operation, the holes are removed from the semiconductor base material through the second impurity region, and the first impurity region is set to a ground voltage (tenth invention).

In the foregoing first invention, one or both of the first gate conductor layer and the second gate conductor layer is/are split into two or more split gate conductor layers as seen in plan view or in the vertical direction, and the split two or more gate conductor layers are operated synchronously or asynchronously (eleventh invention).

In the foregoing eleventh invention, the split gate conductor layers of one of the first gate conductor layer and the second gate conductor layer are arranged on opposite sides of another of the first gate conductor layer or the second gate conductor layer in the vertical direction (twelfth invention).

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a view illustrating the structure of a memory apparatus including SGTs according to a first embodiment;

FIGS. 2A, 2B and 2C are views illustrating the effects obtained when the gate capacitance of a first gate conductor layer 5a connected to a plate line PL is set larger than the gate capacitance of a second gate conductor layer 5b connected to a word line WL in the memory apparatus including the SGTs according to the first embodiment;

FIGS. 3AA, 3AB and 3AC are views for illustrating the mechanism of a write operation for the memory apparatus including the SGTs according to the first embodiment;

FIG. 3B is a view for illustrating the mechanism of a write operation for the memory apparatus including the SGTs according to the first embodiment;

FIG. 4A is a diagram for illustrating the mechanism of a page erase operation for the memory apparatus including the SGTs according to the first embodiment;

FIGS. 4BA, 4BB, 4BC and 4BD are views for illustrating the mechanism of a page erase operation for the memory apparatus including the SGTs according to the first embodiment;

FIG. 4C is a view for illustrating the mechanism of a page erase operation for the memory apparatus including the SGTs according to the first embodiment;

FIGS. 4DA, 4DB, 4DC and 4DD are views for illustrating the mechanism of a page erase operation for the memory apparatus including the SGTs according to the first embodiment;

FIGS. 4EA, 4EB, 4EC and 4ED are views for illustrating the mechanism of a page erase operation for the memory apparatus including the SGTs according to the first embodiment;

FIG. 4F is a circuit block diagram for inputting page data during a page erase operation for the memory apparatus including the SGTs according to the first embodiment;

FIG. 4G is a circuit block diagram for inputting page data during a page erase operation for the memory apparatus including the SGTs according to the first embodiment;

FIG. 4H is a circuit block diagram for inputting page data during a page erase operation for the memory apparatus including the SGTs according to the first embodiment;

FIG. 4I is an operation waveform chart of primary nodes for inputting page data during a page erase operation for the memory apparatus including the SGTs according to the first embodiment;

FIGS. 5A, 5B and 5C are views for illustrating the mechanism of a read operation for the memory apparatus including the SGTs according to the first embodiment;

FIGS. 6A, 6B, 6C and 6D are views for illustrating a write operation for a conventional capacitorless DRAM memory cell;

FIGS. 7A and 7B are views for illustrating problems with the operation of the conventional capacitorless DRAM memory cell; and

FIGS. 8A, 8B and 8C are views for illustrating a read operation for the conventional capacitorless DRAM memory cell.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

Hereinafter, embodiments of a memory apparatus using semiconductor devices (hereinafter referred to as dynamic flash memory) according to the present invention will be described with reference to the drawings.

First Embodiment

The structure and operation mechanism of a dynamic flash memory cell according to a first embodiment of the present invention will be described with reference to FIGS. 1 to 5C. The structure of the dynamic flash memory cell will be described with reference to FIG. 1. Then, the effects obtained when the gate capacitance of a first gate conductor layer 5a connected to a plate line PL is set larger than the gate capacitance of a second gate conductor layer 5b connected to a word line WL will be described with reference to FIGS. 2A, 2B and 2C. Then, the mechanism of a data write operation will be described with reference to FIGS. 3AA, 3AB, 3AC and 3B, the mechanism of a data erase operation will be described with reference to FIGS. 4A to 4ED, and the mechanism of a data read operation will be described with reference to FIGS. 5A, 5B and 5C.

FIG. 1 illustrates the structure of the dynamic flash memory cell according to the first embodiment of the present invention. N⁺ layers 3a and 3b (which are examples of a “first impurity region” and a “second impurity region” in the claims), one of which serves as a source and the other of which serves as a drain, are formed at positions above and below a silicon semiconductor pillar 2 (hereinafter, the silicon semiconductor pillar shall be referred to as a “Si pillar”) with p-type or i-type (intrinsic) conductivity (which is an example of a “semiconductor base material” in the claims) formed on a substrate 1 (which is an example of a “substrate” in the claims). The portion of the Si pillar 2 between the N⁺ layers 3a and 3b serving as the source and the drain is a semiconductor base material 7 (which is an example of a “semiconductor base material” in the claims). A first gate insulating layer 4a (which is an example of a “first gate insulating layer” in the claims) and a second gate insulating layer 4b (which is an example of a “second gate insulating layer” in the claims) are formed so as to surround the semiconductor base material 7. The first gate insulating layer 4a and the second gate insulating layer 4b are respectively in contact with or located in proximity to the N⁺ layers 3a and 3b serving as the source and the drain. A first gate conductor layer 5a (which is an example of a “first gate conductor layer” in the claims) and a second gate conductor layer 5b (which is an example of a “second gate conductor layer” in the claims) are respectively formed so as to surround the first gate insulating layer 4a and the second gate insulating layer 4b. The first gate conductor layer 5a and the second gate conductor layer 5b are separated by an insulating layer 6 (which is an example of a “first insulating layer” in the claims). The semiconductor base material 7 between the N⁺ layers 3a and 3b includes a first channel Si layer 7a (which is an example of a “first semiconductor base material” in the claims) surrounded by the first gate insulating layer 4a, and a second channel Si layer 7b (which is an example of a “second semiconductor base material” in the claims) surrounded by the second gate insulating layer 4b. Accordingly, a dynamic flash memory cell 10 is formed that includes the N⁺ layers 3a and 3b serving as the source and the drain, the semiconductor base material 7, the first gate insulating layer 4a, the second gate insulating layer 4b, the first gate conductor layer 5a, and the second gate conductor layer 5b. The N⁺ layer 3a serving as the source connects to a source line SL (which is an example of a “source line” in the claims), the N⁺ layer 3b serving as the drain connects to a bit line BL (which is an example of a “bit line” in the claims), the first gate conductor layer 5a connects to a plate line PL (which is an example of a “first drive control line” in the claims), and the second gate conductor layer 5b connects to a word line WL (which is an example of a “word line” in the claims). The dynamic flash memory cell 10 desirably has such a structure that the gate capacitance of the first gate conductor layer 5a connecting to the plate line PL is larger than the gate capacitance of the second gate conductor layer 5b connecting to the word line WL.

It should be noted that in FIG. 1, the gate length of the first gate conductor layer 5a is set longer than the gate length of the second gate conductor layer 5b such that the gate capacitance of the first gate conductor layer 5a connected to the plate line PL becomes larger than the gate capacitance of the second gate conductor layer 5b connected to the word line WL. However, it is also possible to, without setting the gate length of the first gate conductor layer 5a to be longer than the gate length of the second gate conductor layer 5b, vary the thicknesses of the two gate insulating layers such that the thickness of the gate insulating film for the first gate insulating layer 4a becomes thinner than the thickness of the gate insulating film for the second gate insulating layer 4b. Alternatively, it is also possible to vary the dielectric constants of the materials of the two gate insulating layers such that the dielectric constant of the gate insulating film for the first gate insulating layer 4a becomes higher than the dielectric constant of the gate insulating film for the second gate insulating layer 4b. As a further alternative, it is also possible to combine any of the lengths of the gate conductor layers 5a and 5b and the thicknesses and dielectric constants of the gate insulating layers 4a and 4b so that the gate capacitance of the first gate conductor layer 5a connected to the plate line PL becomes larger than the gate capacitance of the second gate conductor layer 5b connected to the word line WL.

FIGS. 2A, 2B and 2C are views illustrating the effects obtained when the gate capacitance of the first gate conductor layer 5a connected to the plate line PL is set larger than the gate capacitance of the second gate conductor layer 5b connected to the word line WL.

FIG. 2A schematically illustrates only the main portion of the structure of the dynamic flash memory cell according to the first embodiment of the present invention. The bit line BL, the word line WL, the plate line PL, and the source line SL are connected to the dynamic flash memory cell, and the potential state of the semiconductor base material 7 is determined by their voltage states.

FIG. 2B is a view for illustrating the relationship between their capacitances. The capacitance C_FBof the semiconductor base material 7 is equal to the sum of the capacitance C_WLbetween the gate conductor layer 5b connecting to the word line WL and the semiconductor base material 7, the capacitance C_PLbetween the gate conductor layer 5a connecting to the plate line PL and the semiconductor base material 7, the junction capacitance C_SLof a P-N junction between the source N⁺ layer 3a connecting to the source line SL and the semiconductor base material 7, and the junction capacitance C_BLof a P-N junction between the drain N⁺ layer 3b connecting to the bit line BL and the semiconductor base material 7, and is represented as follows.

C_FB=C_WL+C_PL+C_BL+C_SL (1)

Thus, the coupling ratio β_WLbetween the word line WL and the semiconductor base material 7, the coupling ratio β_PLbetween the plate line PL and the semiconductor base material 7, the coupling ratio β_BLbetween the bit line BL and the semiconductor base material 7, and the coupling ratio β_SLthe between the source line SL and the semiconductor base material 7 are represented as follows.

β_WL=C_WL/(C_WL+C_PL+C_BL+C_SL (2)

β_PL=C_PL/(C_WL+C_PL+C_BL+C_SL) (3)

β_BL=C_BL/(C_WL+C_PL+C_BL+C_SL) (4)

β_SL=C_SL/(C_WL+C_PL+C_BL+C_SL) (5)

Herein, since C_PL>C_WL, β_PL>β_WL.

FIG. 2C is a view for illustrating changes in the voltage V_FBof the semiconductor base material 7 when the voltage V_WLof the word line WL rises and then drops during a read operation or a write operation. Herein, the potential difference ΔV_FBwhen the voltage V_FBof the semiconductor base material 7 changes from a low voltage state V_FBLto a high voltage state V_FBHas the voltage V_WLof the word line WL rises from 0 V to a high voltage state V_WLHis as follows.

ΔV_FB=V_FBH−V_FBL=β_WL×V_WLH (6)

Since the coupling ratio β_WLbetween the word line WL and the semiconductor base material 7 is small and the coupling ratio β_PLbetween the plate line PL and the semiconductor base material 7 is large, ΔV_FBis small. Thus, even when the voltage V_WLof the word line WL oscillates up and down during a read operation or a write operation, the voltage V_FBof the semiconductor base material 7 hardly changes.

FIGS. 3AA, 3AB and 3AC and 3B illustrates a page write operation (which is an example of a “page write operation” in the claims) for the dynamic flash memory cell according to the first embodiment of the present invention. FIG. 3AA illustrates the mechanism of the write operation, and FIG. 3AB illustrates the operation waveforms of the bit line BL, the source line SL, the plate line PL, the word line WL, and the semiconductor base material 7 functioning as a floating body FB. At a time T0, the dynamic flash memory cell is in a “0” erase state and the voltage of the semiconductor base material 7 is V_FB“0.” In addition, Vss is applied to each of the bit line BL, the source line SL, and the word line WL, and V_PLLis applied to the plate line PL. Herein Vss is 0 V and V_PLLis 2 V, for example. Next, at times T1 to T2, when the voltage of the bit line BL rises from Vss to V_BLH, if Vss is 0 V, for example, the voltage of the semiconductor base material 7 becomes V_FB“0”+β_BL×V_BLHdue to the capacitive coupling between the bit line BL and the semiconductor base material 7.

Next, the description of the write operation for the dynamic flash memory cell will be continued with reference to FIGS. 3AA and 3AB. At times T3 to T4, the voltage of the word line WL rises from Vss to V_WLH. Accordingly, provided that the “0” erase threshold voltage of a second N-channel MOS transistor region in the semiconductor base material 7 surrounded by the second gate conductor layer 5b connecting to the word line WL is Vt_WL“0,” the voltage of the semiconductor base material 7 becomes V_FB“0”+β_BL×V_BLH+β_WL×Vt_WL“0” in the range of Vss to Vt_WL“0” due to a second capacitive coupling between the word line WL and the semiconductor base material 7 as the voltage of the word line WL rises. When the voltage of the word line WL has risen to Vt_WL“0” or greater, an annular inversion layer 12b is formed in the semiconductor base material 7 on the inner periphery of the second gate conductor layer 5b, which blocks the second capacitive coupling between the word line WL and the semiconductor base material 7.

Next, the description of the write operation for the dynamic flash memory cell will be continued with reference to FIGS. 3AA and 3AB. At the times T3 to T4, V_PLL=2 V, for example, is fixedly input to the first gate conductor layer 5a connecting to the plate line PL, and the voltage of the second gate conductor layer 5b connecting to the word line WL is increased to V_WLH=4 V, for example. Consequently, as illustrated in FIG. 3AA, an annular inversion layer 12a is formed in the semiconductor base material 7 on the inner periphery of the first gate conductor layer 5a connecting to the plate line PL, and the inversion layer 12a has a pinch-off point 13. Thus, a first N-channel MOS transistor region having the first gate conductor layer 5a operates in the saturation region. Meanwhile, the second N-channel MOS transistor region having the second gate conductor layer 5b connecting to the word line WL operates in the linear region. Thus, there is no pinch-off point in the semiconductor base material 7 on the inner periphery of the second gate conductor layer 5b connecting to the word line WL, and the inversion layer 12b is formed on the entire surface of the inner periphery of the gate conductor layer 5b. The inversion layer 12b formed on the entire surface of the inner periphery of the second gate conductor layer 5b connecting to the word line WL functions as a substantial drain of the second N-channel MOS transistor region having the second gate conductor layer 5b. Thus, an electric field in a first boundary region of the semiconductor base material 7 between the first N-channel MOS transistor region having the first gate conductor layer 5a and the second N-channel MOS transistor region having the second gate conductor layer 5b, which are connected in series, becomes maximum, and an impact ionization phenomenon occurs in the region. Such a region is a region on the source side as seen from the second N-channel MOS transistor region having the second gate conductor layer 5b connecting to the word line WL. Thus, such a phenomenon is called a source-side impact ionization phenomenon. Due to the source-side impact ionization phenomenon, electrons flow from the N⁺ layer 3a connecting to the source line SL to the N⁺ layer 3b connecting to the bit line. The accelerated electrons collide with Si lattice atoms, and electron-hole pairs are generated due to the kinetic energy. Some of the generated electrons flow into the first gate conductor layer 5a and the second gate conductor layer 5b, but most of them flow into the N⁺ layer 3b connecting to the bit line BL (not illustrated).

As illustrated in FIG. 3AC, the generated holes 9 (which are examples of “holes” in the claims) are the majority carriers in the semiconductor base material 7, and charge the semiconductor base material 7 in a positively biased manner. Since the N⁺ layer 3a connecting to the source line SL is at 0 V, the semiconductor base material 7 is charged up to the built-in voltage Vb (about 0.7 V) of the P-N junction between the N⁺ layer 3a connecting to the source line SL and the semiconductor base material 7. When the semiconductor base material 7 is charged in a positively biased manner, the threshold voltage of each of the first N-channel MOS transistor region and the second N-channel MOS transistor region becomes lower due to the substrate bias effect.

Next, the description of the write operation for the dynamic flash memory cell will be continued with reference to FIG. 3AB. At times T6 to T7, the voltage of the word line WL drops from V_WLHto Vss. At this time, the second capacitive coupling occurs between the word line WL and the semiconductor base material 7, but until the voltage V_WLHof the word line WL becomes less than or equal to the threshold voltage Vt_WL“1” of the second N-channel MOS transistor region when the voltage of the semiconductor base material 7 is Vb, the inversion layer 12b blocks the second capacitive coupling. Thus, the substantial capacitive coupling between the word line WL and the semiconductor base material 7 occurs only when the voltage of the word line WL has become less than or equal to Vt_WLv“1” and has dropped down to Vss. Consequently, the voltage of the semiconductor base material 7 becomes Vb31 β_WL×Vt_WL“1.” Herein, Vt_WL“1” is lower than Vt_WL“0,” and β_WL×Vt_WL“1” is small.

Next, the description of the write operation for the dynamic flash memory cell will be continued with reference to FIG. 3AB. At times T8 to T9, the voltage of the bit line BL drops from V_BLHto Vss. Since the bit line BL and the semiconductor base material 7 are capacitively coupled, the voltage V_FB“1” of the semiconductor base material 7 with “1” written thereto finally becomes as follows.

V_FB“1”=Vb−β_WL×Vt_WL“1”−β_BL×V_BLH (7)

Herein, the coupling ratio β_BLbetween the bit line BL and the semiconductor base material 7 is also small. Accordingly, as illustrated in FIG. 3B, the threshold voltage of the second N-channel MOS transistor region in the second semiconductor base material 7b connecting to the word line WL becomes low. The page write operation is performed by setting the voltage of the semiconductor base material 7 in the “1” written state as a first data retention voltage (which is an example of a “first data retention voltage” in the claims), and such a state is allocated as logical memory data “1.”

It should be noted that during the write operation, it is also possible to generate electron-hole pairs through an impact ionization phenomenon not in the first boundary region but in a second boundary region between the first impurity region 3a and the first semiconductor base material 7a or a third boundary region between the second impurity region 3b and the second semiconductor base region 7b, and then charge the semiconductor base material 7 with the generated holes 9.

The mechanism of a page erase operation (which is an example of a “page erase operation” in the claims) will be described with reference to FIGS. 4A to 4ED.

FIG. 4A illustrates a memory block circuit diagram for illustrating a page erase operation. Herein a total of nine (3 rows×3 columns) memory cells CL₁₁to CL₃₃are illustrated, but the actual memory block (which is an example of a “block” in the claims) is larger than such a matrix. When memory cells are arranged in a matrix, one of the directions of the array is referred to as a “row direction” (or “rows”), and a direction perpendicular thereto is referred to as a “column direction” (or “columns”). A source line SL, bit lines BL₁to BL₃, plate lines PL₁to PL₃, and word lines WL₁to WL₃are connected to the respective memory cells. For example, a case is considered where a page erase operation is performed by selecting memory cells CL₂₁to CL₂₃connecting to the plate line PL₂and the word line WL₂in the block.

The mechanism of the page erase operation will be described with reference to FIGS. 4BA, 4BB, 4BC, 4BD and 4C. Herein, the semiconductor base material 7 between the N⁺ layers 3a and 3b is electrically isolated from the substrate, and functions as a floating body. FIG. 4BA is an operation timing waveform chart of the primary nodes in the erase operation. In FIG. 4BA, T0 to T12 represent a period of times from when the erase operation starts till it ends. FIG. 4BB illustrates a state in which the holes 9 generated through impact ionization in a previous cycle are stored in the semiconductor base material 7 at the time T0 before the erase operation is started. At the times T1 to T2, the bit lines BL₁to BL₃and the source line SL respectively become high voltage states of V_BLHand V_SLHfrom Vss. Herein, Vss is 0 V, for example. In a next first period of the times T3 to T4, the plate line PL₂and the word line WL₂selected in the page erase operation respectively become a high voltage state of a second voltage V_PLHfrom a first voltage V_PLLand a high voltage state of a fourth voltage V_WLHfrom a third voltage Vss. Thus, neither the inversion layer 12a on the inner periphery of the first gate conductor layer 5a connecting to the plate line PL₂nor the inversion layer 12b on the inner periphery of the second gate conductor layer 5b connecting to the word line WL₂is formed in the semiconductor base material 7. Thus, provided that the threshold voltage of the second N-channel MOS transistor region on the side of the word line WL₂is V_tWLand the threshold voltage of the of the first N-channel MOS transistor region on the side of the plate line PL₂is V_tPL, it is desirable that the voltages V_BLHand V_SLHsatisfy V_BLH>V_WLH+V_tWLand V_SLH>V_PLH+V_tPL. For example, when V_tWLand V_tPLare 0.5 V, V_WLHand V_PLHmay be set to 3 V, and V_BLHand V_SLHmay be set to greater than or equal to 3.5 V.

Next, the description of the mechanism of the page erase operation in FIG. 4BA will be continued. At the times T3 to T4 of the first period, as the plate line PL₂and the word line WL₂respectively become high voltage states of the second voltage V_PLHand the fourth voltage V_WLH, the voltage of the semiconductor base material 7 in the floating state is boosted due to the first capacitive coupling between the plate line PL₂and the semiconductor base material 7 and the second capacitive coupling between the word line WL₂and the semiconductor base material 7. The voltage of the semiconductor base material 7 becomes a high voltage from V_FB“1” in the “1” written state. This is because since the bit lines BL₁to BL₃and the source line SL are respectively at high voltages of V_BLHand V_SLH, the P-N junction between the source N⁺ layer 3a and the semiconductor base material 7 and the P-N junction between the drain N⁺ layer 3b and the semiconductor base material 7 are reverse-biased, which allows for boosting of the voltage of the semiconductor base material 7.

Next, the description of the mechanism of the page erase operation in FIG. 4BA will be continued. Next, at the times T5 to T6 of a second period, the voltages of the bit lines BL₁to BL₃and the source line SL respectively drop from the high voltages of V_BLHand V_SLHto Vss. Consequently, the P-N junction between the source N⁺ layer 3a and the semiconductor base material 7 and the P-N junction between the drain N⁺ layer 3b and the semiconductor base material 7 are forward-biased as illustrated in FIG. 4BC, and the remaining holes of the holes 9 in the semiconductor base material 7 are discharged to the source N⁺ layer 3a and the drain N⁺ layer 3b. Thus, the voltage V_FBof the semiconductor base material 7 becomes the built-in voltage Vb of the P-N junction formed by the source N⁺ layer 3a and the semiconductor base material 7 as the P-layer and the P-N junction formed by the drain N⁺ layer 3b and the semiconductor base material 7 as the P-layer.

Next, the description of the mechanism of the page erase operation in FIG. 4BA will be continued. Next, at the times T7 to T8, the voltages of the bit lines BL₁to BL₃and the source line SL respectively rise from Vss to high voltages of V_BLHand V_SLH. Accordingly, as illustrated in FIG. 4BD, when the voltages of the plate line PL₂and the word line WL₂respectively drop from the second voltage V_PLHand the fourth voltage V_WLHto the first voltage V_PLLand the third voltage Vss at the times T11 to T12 of a third period, neither the inversion layer 12a on the side of the plate line PL₂nor the inversion layer 12b on the side of the word line WL₂is formed in the semiconductor base material 7. Thus, the voltage V_FBof the semiconductor base material 7 efficiently becomes V_FB“0” from Vb due to the first capacitive coupling between the plate line PL₂and the semiconductor base material 7 and the second capacitive coupling between the word line WL₂and the semiconductor base material 7. Thus, the voltage difference ΔV_FBof the semiconductor base material 7 between the “1” written state and the “0” erase state is represented by the following expression.

V
FB

⁢

″

1
″

=

Vb
-

β
WL

×

Vt
WL

⁢

″

1
″

-

β
CL

×

V
BLH

(
7
)

V
FB

⁢

″

0
″

=

Vb
-

β
WL

×

V
WLH

-

β
PL

×

(

V
PLH

-

V
PLL

)

(
8
)

Δ
⁢

V
FB

=

V
FB

⁢

″

1
″

-

V
FB

⁢

″

0
″

=

β
WL

×

V
WLH

+

β
PL

×

(

V
PLH

-

V
PLL

)

-

β
WL

×

Vt
WL

⁢

″

1
″

-

β
BL

×

V
BLH

(
9
)

Herein, since the sum of β_WLand β_PLis greater than or equal to 0.8, ΔV_FBis large enough to provide a margin.

Consequently, as illustrated in FIG. 4C, a large margin is provided between the “1” written state and the “0” erase state. Herein, in the “0” erase state, the threshold voltage on the side of the plate line PL₂is high due to the substrate bias effect. Thus, if the voltage applied to the plate line PL₂is set to less than or equal to the threshold voltage, for example, the first N-channel MOS transistor region on the side of the plate line PL₂becomes non-conductive, and thus, no memory cell current flows therethrough. Such a state is illustrated.

Next, the description of the mechanism of the page erase operation in FIG. 4BA will be continued. Next, at the times T11 to T12 of the third period, the voltages of the bit lines BL₁to BL₃and the source line SL respectively drop from V_BLHto Vss and from V_SLHto Vss, whereby the erase operation terminates. At this time, the voltage of the semiconductor base material 7 is slightly lowered by the bit lines BL₁to BL₃and the source line SL due to capacitive coupling. However, since the amount of the lowered voltage is equal to the amount of the voltage of the semiconductor base material 7 increased by the bit lines BL₁to BL₃and the source line SL due to capacitive coupling at the times T7 to T8, the voltage rise and drop of each of the bit lines BL₁to BL₃and the source line SL are cancelled out, and thus have no influence on the voltage of the semiconductor base material 7. The page erase operation is performed by setting the voltage V_FB“0” of the semiconductor base material 7 in the “0” erase state as a second data retention voltage (which is an example of a “second data retention voltage” in the claims), and such a state is allocated as logical memory data “0.”

Next, the mechanism of a page erase operation will be described with reference to FIGS. 4DA, 4DB, 4DC and 4DD. FIGS. 4DA to 4DD differ from FIGS. 4BA, 4BB, 4BC and 4BD in that during the page erase operation, the bit lines BL₁to BL₃are set to Vss, which is a ground voltage (which is an example of a “ground voltage” in the claims), or to a floating state (which is an example of a “floating state” in the claims), and the voltage of the word line WL₂is fixed to Vss. Accordingly, even when the voltage of the source line SL rises from Vss to V_SLHat times T1 to T2, the second N-channel MOS transistor region on the side of the word line WL₂does not become conductive, and thus, no memory cell current flows therethrough. Thus, there is no hole 9 generated through an impact ionization phenomenon. Other than that, as in FIGS. 4B, the voltage of the source line SL oscillates between Vss and V_SLH, and the voltage of the plate line PL₂oscillates between V_PLLand V_PLH. Consequently, as illustrated in FIG. 4DC, the holes 9 are discharged to the N⁺ layer 3a as the first impurity region of the source line SL.

Next, the mechanism of a page erase operation will be described with reference to FIGS. 4EA, 4EB, 4EC and 4ED. FIGS. 4EA, 4EB, 4EC and 4ED differ from FIGS. 4BA, 4BB, 4BC and 4BD in that during the page erase operation, the source line SL is set to Vss or to a floating state, and the voltage of the plate line PL₂is fixed to Vss. Accordingly, even when the voltages of the bit lines BL₁to BL₃rise from Vss to V_BLHat times T1 to T2, the first N-channel MOS transistor region on the side of the plate line PL₂does not become conductive, and thus, no memory cell current flows therethrough. Thus, there is no hole 9 generated through an impact ionization phenomenon. Other than that, as in FIGS. 4BA, 4BB, 4BC and 4BD, the voltages of the bit lines BL₁to BL₃oscillate between Vss and V_BLH, and the voltage of the word line WL₂oscillates between Vss and V_WLH. Consequently, as illustrated in FIG. 4EC, the holes 9 are discharged to the N⁺ layer 3b as the second impurity region connecting to one of the bit lines BL₁to BL₃.

FIGS. 4F, 4G and 4H are circuit block diagrams for inputting page data during a page erase operation for the memory apparatus including the dynamic flash memory cells according to the first embodiment of the present invention. FIG. 4I is an operation waveform chart of its primary nodes.

In FIG. 4F, 3 rows×3 columns of memory cells C00 to C22 partially form a block. Although 3 rows×3 columns of the memory cells C00 to C22 are illustrated herein, the actual block has a matrix of memory cells with a size larger than 3 rows×3 columns. Word lines WL0 to WL2, plate lines PL0 to PL2, a source line SL, and bit lines BL0 to BL2 are connected to the respective memory cells. Transistors T0C to T2C whose gates receive a transfer signal FT form a first switch circuit (which is an example of a “first switch circuit” in the claims). In addition, the drains of transistors T0D to T2D whose gates connect to an erase signal FS connect to a bit line erase signal VB, while the sources thereof respectively connect to the bit lines BL0 to BL2. The bit lines BL0 to BL2 respectively connect to sense amplifier circuits SA0 to SA2 (each of which is an example of a “sense amplifier circuit” in the claims) via the first switch circuit. The sense amplifier circuits SA0 to SA2 connect to a pair of complementary input/output lines IO and /IO via transistors T0A to T2B whose gates connect to column selection lines CSL0 to CSL2.

FIG. 4G illustrates a view in which “1” is randomly written to the memory cells C01, C02, C10, C12, and C21 among the memory cells C00 to C22 at a given timing, and the holes 9 are thus stored in their semiconductor base material 7.

With reference to FIG. 4H, an example will be described in which a page (which is an example of a “page” in the claims) formed by the memory cells C01, C11, and C21 is selected, and a page erase operation is performed on the memory cells. Hereinafter, specific description will be made with reference to FIG. 4I.

At a time T1 illustrated in FIG. 4I, the page erase operation is started. During the page erase operation, the voltage of the plate line PL1 connected to the memory cells C01, C11, and C21 drops from the low fixed voltage V_PLLto Vss through a page write operation and a page read operation. Herein, Vss is 0 V, for example. Accordingly, each first N-channel MOS transistor region subjected to a gate input from the plate line becomes non-conductive state. Thus, even when the voltage of each of the bit lines BL0 to BL2 oscillates between Vss and V_BLHduring the page erase operation, no memory cell current flows through the memory cells C01, C11, and C21, and there is no hole 9 generated through an impact ionization. It should be noted that when the page erase operation is started, the voltage of the erase signal FS rises from Vss to V_FSH, and a bit line erase signal VB is supplied to the bit lines BL0 to BL2 from the drains of the respective transistors T0D to T2D. Consequently, the voltage of each of the bit lines BL0 to BL2 oscillates between Vss and V_BLHduring the page erase operation. A page erase operation of pulling out the holes 9 by the other bit lines is similar to that described with reference to FIG. 4EA.

The following will specifically describe that during the page erase operation performed on the memory cells C01, C11, and C21 illustrated in FIG. 4I, page data (which is an example of “page data” in the claims) for a page write operation is concurrently input to the sense amplifier circuits.

At the start time T1 of the page erase operation illustrated in FIG. 4I, the transfer signal FT is at Vss. Thus, the transistors T0C to T2C whose gates receive the transfer signal FT are off to non-conductive state, and the bit lines BL0 to BL2 are respectively disconnected from the sense amplifier circuits SA0 to SA2. Consequently, oscillation of the voltage of each of the bit lines BL0 to BL2 between Vss and V_BLHduring the page erase operation has no influence on the sense amplifier circuits SA0 to SA2.

During the page erase operation illustrated in FIG. 4I, page data is input to the sense amplifier circuits SA0 to SA2 from the complementary input/output lines IO and /IO such that input is sequentially made through column selection lines CSL0 to CSL2 to the transistors T0A to T2B. In this manner, as the input of the page data and the page erase operation are concurrently performed, the time taken for the page write operation can be significantly reduced.

When the page erase operation is complete at a time T12 illustrated in FIG. 4I, the page data input to the sense amplifier circuits SA0 to SA2 are respectively written to the memory cells C01, C11, and C21 at a time T13. It should be noted that at the time T13, the voltage of the transfer signal FT rises from Vss to V_FTH, and thus, the transistors T0C to T2C are turned on to conductive state. Consequently, the bit lines BL0 to BL2 are respectively connected to the sense amplifier circuits SA0 to SA2.

With the circuit blocks illustrated in FIGS. 4F, 4G and 4H, it is also possible to, during a page erase operation for the memory apparatus including the dynamic flash memory cells according to the first embodiment of the present invention, allow the page data stored in the sense amplifier circuits SA0 to SA2 to be output to the complementary input/output lines IO and /IO. Hereinafter, specific description will be made with reference to FIGS. 4G and 4H.

A case illustrated in FIG. 4G is considered where the word line WL1 is selected and memory data in the memory cells C01, C11, and C21 are respectively read into the bit lines BL0 to BL2. During the page read operation, the transfer signal FT is at V_FTH, and the transistors T0C to T2C that are the first switch circuits are on to conductive state. Thus, the memory data in the memory cells C01, C11, and C21 are respectively read by the sense amplifier circuits SA0 to SA2, and whether the logic level of the data is “0” or “1” is determined therein. Then, when a page erase operation illustrated in FIG. 4H starts, the voltage of the transfer signal FT drops from V_FTHto Vss, and the transistors T0C to T2C that are the first switch circuits are thus turned off to non-conductive state. Consequently, the bit lines BL0 to BL2 are respectively electrically disconnected from the sense amplifier circuits SA0 to SA2. During the page erase operation, the page data stored in the memory cells C01, C11, and C21 are erased, for example. In this example, data “1” in the memory cell C01, data “0” in the memory cell C11, and data “1” in the memory cell C21 are all erased, so that data “0” results. The sense amplifier circuits SA0 to SA2 respectively store the page data read from the memory cells C01, C11, and C21. Next, input is sequential made through the column selection lines CSL0 to CSL2 to the gates of the transistors T0A to T2B so that the page data stored in the sense amplifier circuits SA0 to SA2 are output to the complementary input/output lines IO and /IO.

In this manner, electrically disconnecting the bit lines from the sense amplifier circuits using the respective first switch circuits can, during a page erase operation, allow page data stored in the sense amplifier circuits to be freely read, or allow page data for a page write operation to be input to the sense amplifier circuits. Thus, the page erase operation can be performed as a blind operation behind the page read operation or the page write operation. Consequently, a memory apparatus compatible with a high-speed system can be provided.

FIGS. 5A, 5B and 5C are views for illustrating a read operation for the dynamic flash memory cell according to the first embodiment of the present invention. As illustrated in FIG. 5A, when the semiconductor base material 7 is charged up to the built-in voltage Vb (about 0.7 V), the threshold voltage of the second N-channel MOS transistor region having the second gate conductor layer 5b connecting to the word line WL drops due to the substrate bias effect. Such a state is allocated as the logical memory data “1.” As illustrated in FIG. 5B, a memory block selected before a write operation is performed is set to the erase state “0” in advance, and thus, the voltage V_FBof the semiconductor base material 7 is V_FB“0.” Through a write operation, the written state “1” is randomly stored. Consequently, logical memory data at logic levels “0” and “1” are created for the word line WL. As illustrated in FIG. 5C, reading is performed with a sense amplifier by utilizing the difference in level between the two threshold voltages for the word line WL. In reading data, setting the voltage applied to the first gate conductor layer 5a connecting to the plate line PL to be higher than the threshold voltage corresponding to the logical memory data “1” and lower than the threshold voltage corresponding to the logical memory data “0” can obtain such characteristics that no current flows even when the voltage of the word line WL is set high as illustrated in FIG. 5C.

The dynamic flash memory operation described in the present embodiment can be performed regardless of whether the horizontal cross-sectional shape of the Si pillar 2 in FIG. 1 is circular, elliptical, or rectangular. In addition, dynamic flash memory cells having Si pillars 2 with circular, elliptical, and rectangular horizontal cross-sections may be provided in a mixed manner on an identical chip.

A dynamic flash memory device has been described with reference to FIG. 1 regarding an example of a SGT in which the first gate insulating layer 4a and the second gate insulating layer 4b are provided around the entire side face of the Si pillar 2 disposed in an upright position on a substrate 1 along the vertical direction, and the first gate conductor layer 5a and the second gate conductor layer 5b are respectively provided around the entire first gate insulating layer 4a and the entire second gate insulating layer 4b. As described in the present embodiment, it is acceptable as long as the present dynamic flash memory device has a structure that satisfies the condition that the holes 9 generated through an impact ionization phenomenon are retained in the semiconductor base material 7. To this end, it is acceptable as long as the semiconductor base material 7 has a floating body structure isolated from the substrate 1. Accordingly, even when the semiconductor base material of the semiconductor base material is formed horizontally on the substrate 1 using the GAA (Gate All Around; for example, see E. Yoshida: “A Capacitorless 1T-DRAM Technology Using Gate-induced Drain-Leakage (GIDL) Current for Low-power and High-speed Embedded Memory,” IEEE IEDM (2006)) technology, which is one of SGTs, or the nanosheet technology (for example, see J. Y. Song, W. Y. Choi, J. H. Park, J. D. Lee, and B-G. Park: “Design Optimization of Gate-All-Around (GAA) MOSFETs,” IEEE Trans. Electron Devices, vol. 5, no. 3, pp. 186-191, May 2006), for example, the aforementioned dynamic flash memory operation can be performed. Alternatively, a device structure using SOI (Silicon On Insulator; for example, see J. Wan, L. Rojer, A. Zaslavsky, and S. Critoloveanu: “A Compact Capacitor-Less High-Speed DRAM Using Field Effect-Controlled Charge Regeneration,” Electron Device Letters, Vol. 35, No. 2, pp. 179-181 (2012), T. Ohsawa, K. Fujita, T. Higashi, Y. Iwata, T. Kajiyama, Y. Asao, and K. Sunouchi: “Memory design using a one-transistor gain cell on SOI,” IEEE JSSC, vol. 37, No. 11, pp 1510-1522 (2002), T. Shino, N. Kusunoki, T. Higashi, T. Ohsawa, K. Fujita, K. Hatsuda, N. Ikumi, F. Matsuoka, Y. Kajitani, R. Fukuda, Y. Watanabe, Y. Minami, A. Sakamoto, J. Nishimura, H. Nakajima, M. Morikado, K. Inoh, T. Hamamoto, A. Nitayama: “Floating Body RAM Technology and its Scalability to 32 nm Node and Beyond,” IEEE IEDM (2006), and E. Yoshida: “A Capacitorless 1T-DRAM Technology Using Gate-induced Drain-Leakage (GIDL) Current for Low-power and High-speed Embedded Memory,” IEEE IEDM (2006)) may also be used. In such a device structure, the bottom of the semiconductor base material is in contact with an insulating layer of a SOI substrate, and the semiconductor base material is surrounded by a gate insulating layer and device isolation insulating layers together with other semiconductor base materials. Even in such a structure, the semiconductor base material has a floating body structure. In this manner, it is acceptable as long as the dynamic flash memory device provided by the present embodiment satisfies the condition that its semiconductor base material has a floating body structure. Further, even with a structure in which a Fin transistor (for example, see H. Jiang, N. Xu, B. Chen, L. Zengl, Y. He, G. Du, X. Liu and X. Zhang: “Experimental investigation of self-heating effect (SHE) in multiple-fin SOI FinFETs,” Semicond. Sci. Technol. 29 (2014) 115021 (7pp)) is formed on a SOI substrate, the present dynamic flash operation can be performed as long as its semiconductor base material has a floating body structure.

To write “1,” it is also possible to generate electron-hole pairs using a GIDL (Gate Induced Drain Leakage) current (for example, see E. Yoshida, and T. Tanaka: “A Capacitorless 1T-DRAM Technology Using Gate-Induced Drain-Leakage (GIDL) Current for Low-Power and High-Speed Embedded Memory,” IEEE Transactions on Electron Devices, Vol. 53, No. 4, pp. 692-69, April 2006), and then fill the semiconductor base material 7 with the generated holes.

Expressions (1) to (12) in the present specification and drawings are only used to qualitatively describe phenomena. Thus, such expressions are not intended to limit the phenomena.

Although each of the reset voltages of the word line WL, the bit line BL, and the source line SL is indicated by Vss in the description made with reference to FIGS. 3AA, 3AB, 3AC and 3B, the reset voltages may be different voltages.

In FIG. 4, exemplary conditions of a page erase operation have been illustrated. In contrast, it is also possible to change the voltage applied to each of the source line SL, the plate line PL, the bit line BL, and the word line WL as long as the state of removing the holes 9 in the semiconductor base material 7 from one or both of the N⁺ layer 3a and the N⁺ layer 3b is achieved. In addition, in a page erase operation, it is also possible to apply a voltage to the source line SL and bring the bit line BL into a floating state in the selected page. Alternatively, in a page erase operation, it is also possible to apply a voltage to the bit line BL and bring the source line SL into a floating state in the selected page.

In FIG. 1, in a portion of the semiconductor base material 7 surrounded by the insulating layer 6 as the first insulating layer in the vertical direction, potential distributions of the first semiconductor base material 7a and the second semiconductor base material 7b are formed continuously. Accordingly, the semiconductor base material 7 including the first semiconductor base material 7a and the second semiconductor base material 7b is continuous in the vertical direction across its region surrounded by the insulating layer 6 as the first insulating layer.

It should be noted that in FIG. 1, it is desirable that the length in the vertical direction of the first gate conductor layer 5a connecting to the plate line PL be made further longer than the length in the vertical direction of the second gate conductor layer 5b connecting to the word line WL so that C_PL>C_WL. However, it is possible to reduce the capacitive coupling ratio (C_WL/(C_PL+C_WL+C_BL+C_SL)) of the word line WL to the semiconductor base material 7 only by adding the plate line PL. Consequently, potential fluctuation ΔV_FBof the semiconductor base material 7 as the floating body becomes small.

In addition, as the voltage V_PLLof the plate line PL, a fixed voltage of 2 V may be applied, for example, in each operation mode other than an operation mode in which selective erasing is performed through a per-block erase operation.

It should be noted that the term “cover” as included in the following phrase: “the gate insulating layer, the gate conductor layer, or the like covers the channel or the like” in the present specification and claims includes a case where the channel or the like is entirely covered as in a SGT or a GAA, a case where the channel or the like is partially covered as in a Fin transistor, and a case where the channel or the like overlaps a planar object as in a planar transistor.

In addition, in FIG. 1, the first gate conductor layer 5a may be split into two or more gate conductor layers as seen in plan view or in the vertical direction, and the resulting two or more gate conductor layers may be operated as conductor electrodes for the plate line synchronously or asynchronously and with the same drive voltage or different drive voltages. Similarly, the second gate conductor layer 5b may be split into two or more gate conductor layers as seen in plan view or in the vertical direction, and the resulting two or more gate conductor layers may be operated as conductor electrodes for the word line synchronously or asynchronously and with the same drive voltage or different drive voltages. Even with such a structure, the dynamic flash memory operation can be performed. When the first gate conductor layer 5a is split into two or more gate conductor layers, at least one of the resulting gate conductor layers of the first gate conductor layer performs the role of the aforementioned first gate conductor layer 5a. Regarding the second gate conductor layer 5b split into two or more gate conductor layers also, at least one of the resulting gate conductor layers of the second gate conductor layer performs the role of the aforementioned second gate conductor layer 5b. In addition, the split gate conductor layers of one of the first gate conductor layer 5a and the second gate conductor layer 5b may be arranged on the opposite sides of the other of the first gate conductor layer 5a or the second gate conductor layer 5b in the vertical direction.

The aforementioned conditions of the voltages applied to the bit line BL, the source line SL, the word line WL, and the plate line PL as well as the voltage of the floating body are only examples for performing the basic operation including an erase operation, a write operation, and a read operation. Thus, other voltage conditions may also be employed as long as the basic operation of the present invention can be performed.

In FIG. 1, the first gate conductor layer 5a may connect to the word line WL, and the second gate conductor layer 5b may connect to the plate line PL. Even with such a structure, the present dynamic flash memory operation described above can be performed.

It is also possible to provide a junctionless structure in which each of the N⁺ layers 3a and 3b and the semiconductor base material of the P layer 7 in the dynamic flash memory cell illustrated in FIG. 1 has the same conductivity type. This is also true of the other embodiments.

The present embodiment has the following features.

(Feature 1)

In the dynamic flash memory cell of the present embodiment, the N⁺ layers 3a and 3b serving as the source and the drain, the semiconductor base material 7, the first gate insulating layer 4a, the second gate insulating layer 4b, the first gate conductor layer 5a, and the second gate conductor layer 5b are formed in a pillar shape as a whole. In addition, the N⁺ layer 3a serving as the source connects to the source line SL, the N⁺ layer 3b serving as the drain connects to the bit line BL, the first gate conductor layer 5a connects to the plate line PL, and the second gate conductor layer 5b connects to the word line WL. The dynamic flash memory cell has such a structure that the gate capacitance of the first gate conductor layer 5a connecting to the plate line PL is larger than the gate capacitance of the second gate conductor layer 5b connecting to the word line WL. In the present dynamic flash memory cell, the first gate conductor layer and the second gate conductor layer are stacked in the vertical direction. Therefore, even though the dynamic flash memory cell has such a structure that the gate capacitance of the first gate conductor layer 5a connecting to the plate line PL is larger than the gate capacitance of the second gate conductor layer 5b connecting to the word line WL, an increase in the memory cell area as seen in plan view can be avoided. Accordingly, higher performance and a higher degree of integration of the dynamic flash memory cell can be achieved at the same time.

(Feature 2)

During a page erase operation for the dynamic flash memory cells according to the first embodiment of the present invention, page data for a page write operation can be input to the sense amplifier circuits. Consequently, as the input of the page data and the page erase operation are concurrently performed, the time taken for the page write operation can be significantly reduced.

(Feature 3)

When a page erase operation is performed on the dynamic flash memory cell according to the first embodiment of the present invention, one or both of the voltage of the first gate conductor layer 5a connecting to the plate line PL and the voltage of the second gate electrode 5b connecting to the word line WL changes from a low level to a high level. Thus, due to capacitive coupling with the semiconductor base material 7, one or both of a P-N junction between the source N⁺ layer 3a and the semiconductor base material 7 and a P-N junction between the drain N⁺ layer 3b and the semiconductor base material 7 is/are forward-biased, and the holes 9 in the semiconductor base material 7 are easily discharged to the source N⁺ layer 3a and/or the drain N⁺ layer 3b. Accordingly, as long as the bit lines are disconnected from the sense amplifiers, for example, the page erase operation can be performed during the operation of the sense amplifier circuits. That is, it is possible to read page data from the sense amplifier circuits, or input page data to the sense amplifier circuits during the page erase operation. Thus, the page erase operation can be executed as a blind operation behind another read or write operation. Consequently, high-speed rewriting and reading are achieved.

(Feature 4)

Following the operation described in (Feature 2) of the dynamic flash memory cell according to the first embodiment of the present invention, one or both of the voltage of the first gate conductor layer 5a connecting to the plate line PL and the voltage of the second gate conductor layer 5b connecting to the word line WL returns from the high level to the low level. Thus, due to capacitive coupling with the semiconductor base material 7 again, the voltage of the semiconductor base material 7 is negatively biased. In this manner, it is possible to negatively bias the voltage of the semiconductor base material 7 in the “0” erase state without applying a negative bias to the source N⁺ layer 3a or the drain N⁺ layer 3b. This eliminates the need for a double-structure well or a negative-bias generation circuit for applying a negative bias, and thus can simplify the design of a memory core and a peripheral circuit as well as a process therefor.

(Feature 5)

A focus is now placed on the role of the first gate conductor layer 5a, which connects to the plate line PL, of the dynamic flash memory cell according to the first embodiment of the present invention. The voltage of the word line WL oscillates up and down while a write operation or a read operation is performed on the dynamic flash memory cell. At this time, the plate line PL performs the role of reducing the capacitive coupling ratio between the word line WL and the semiconductor base material 7. Consequently, it is possible to significantly suppress the influence of changes in the voltage of the semiconductor base material 7 when the voltage of the word line WL oscillates up and down. Accordingly, it is possible to increase the difference between the threshold voltages of the SGT transistor on the side of the word line WL corresponding to logic levels of “0” and “1.” This leads to an increased operation margin of the dynamic flash memory cell. In addition, in reading data, setting the voltage applied to the first gate conductor layer 5a connecting to the plate line PL to be higher than the threshold voltage corresponding to the logical memory data “1” and lower than the threshold voltage corresponding to the logical memory data “0” can obtain such characteristics that no current flows even when the voltage of the word line WL is set high. This leads to a further increased operation margin of the dynamic flash memory cell.

(Feature 6)

In the dynamic flash memory cell of the first embodiment, the page erase operation described with reference to FIGS. 4A to 4ED is performed, but rewriting is performed with an electric field significantly lower than that in a typical flash memory. Therefore, there is no need to limit the number of times of rewriting for page erase operations from the perspective of reliability.

Other Embodiments

Although Si pillars are formed in the present invention, it is also possible to form semiconductor pillars of a semiconductor material other than Si. This is also true of the other embodiments according to the present invention.

In a vertical NAND flash memory circuit, a plurality of memory cells, each including a semiconductor pillar as a channel and also including a tunnel oxide layer, a charge storage layer, an interlayer dielectric layer, and a control conductor layer surrounding the semiconductor pillar, are formed in the vertical direction. A source-line impurity region corresponding to a source and a bit-line impurity region corresponding to a drain are provided at opposite ends of the semiconductor pillar in each memory cell. In addition, if one of memory cells on the opposite sides of a single memory cell serves the role of a source, the other serves the role of a drain. As described above, the vertical NAND flash memory circuit is one of SGT circuits. Thus, the present invention is also applicable to a mixed circuit including a NAND flash memory circuit.

When writing “1,” it is also possible to generate electron-hole pairs through an impact ionization phenomenon using a gate induced drain leakage (GIDL) current described in E. Yoshida, and T. Tanaka: “A Capacitorless 1T-DRAM Technology Using Gate-Induced Drain-Leakage (GIDL) Current for Low-Power and High-Speed Embedded Memory,” IEEE Transactions on Electron Devices, Vol. 53, No. 4, pp. 692-69, April 2006, and then fill the floating body FB with the generated holes. This is also true of the other embodiments according to the present invention.

In FIG. 1, the dynamic flash memory operation can also be performed with a structure obtained by reversing the polarity of the conductivity type of each of the N⁺ layers 3a and 3b and the Si pillar 2 as the P-layer. In such a case, the majority carriers in the n-type Si pillar 2 are electrons. Thus, electrons generated through impact ionization are stored in the semiconductor base material 7, and the semiconductor base material 7 is thus set to the state “1.”

The present invention can be implemented in various embodiments and modifications without departing from the broad spirit and scope of the present invention. In addition, each of the aforementioned embodiments only describes an example of the present invention and is not intended to limit the scope of the present invention. The aforementioned examples and modified examples can be combined as appropriate. Further, even if some of the components of the aforementioned embodiments are removed as necessary, the resulting structure is within the technical idea of the present invention.

INDUSTRIAL APPLICABILITY

With the memory apparatus using the semiconductor devices according to the present invention, it is possible to obtain dynamic flash memory that is a memory apparatus using high-density and high-performance SGTs.