BACKGROUND OF THE INVENTION 0001 1. Field of the Invention 0002 The present invention relates to a method of manufacturing a printed wiring board comprising the step of efficiently forming a metal film by electroplating to provide a plurality of circuit patterns isolated from each other on a substrate. 0003 2. Disclosure of the Prior Art 0004 In a conventional method of manufacturing printed wiring boards, a metal thin film is first formed on a substrate, and required regions of the metal thin film are removed by using a laser beam to form patterns of the metal thin film on the substrate. Then, electroplating is performed to form an additional metal film on the patterns of the metal thin film, so that the circuit patterns having an increased thickness is obtained on the substrate. 0005 However, when the patterns of the metal thin film on the substrate are electrically isolated from each other, the electroplating step becomes very complicated. For example, when a circuit pattern 30 is electrically insulated from the circuit pattern 32, as shown in FIG. 20, it is required to individually perform electroplating with respect to each of these isolated circuit patterns to form addition metal films thereon. As a result, an increase in production cost is caused by an extension of time required for the electroplating step. In addition, a quality of the plating solution must be very often checked. 0006 On the other hand, by providing a feeder circuit for electroplating to each of the isolated circuit patterns, it is possible to form the additional films on the isolated circuit patterns at a time by electroplating. However, in this method, there is a limitation in manufacturing printed wiring boards with high-density circuit patterns. That is, as the density of circuit patterns is higher, a reliability of the circuit patterns formed by electroplating deteriorates. 0007 To eliminate the above-described inconveniences, U.S. Pat. No. 5,494, 781 discloses an improved method of manufacturing a printed wiring board. According to this method, it is possible to simultaneously form the additional metal films on the isolated circuit patterns by electroplating without supplying electric current to the isolated circuit patterns through the feeder circuits. 0008 That is, as shown in FIG. 21A, by pattering a metal thin film formed on the substrate, circuit patterns (30P, 32P) isolated from each other and a conductive layer 40P extending therebetween are provided on the substrate. After a resist film 90P is formed on the conductive layer 40P, electroplating is performed by the passage of electric current through the isolated circuit patterns (30P, 32P) connected by the conductive layer 40P to simultaneously form an additional metal film 50P on these circuit patterns, as shown in FIG. 21B. At this time, since the conductive layer 40P is covered with the resist film 90P, the additional film 50P is not formed on the conductive layer. After the electroplating, the resist film 90P is removed to expose the conductive layer 40P, and the conductive layer 40P is removed by soft etching to make an electrical insulation between the isolated circuit patterns (30P, 32P), as shown in FIG. 21C. 0009 However, since the step of forming the resist film 90P on the conductive layer 40P is needed, it leads to an increase in production cost. In particular, when forming a three-dimensional circuit pattern on a substrate for MID (molded interconnect device), or manufacturing a high-density printed wiring board, the difficulty of forming the resist film on the conductive layer comes into a problem. In addition, when the removal of the conductive layer 40P after the electroplating is not enough, there is a fear that insulation failure occurs.

SUMMARY OF THE INVENTION 0010 Therefore, a concern of the present invention is to provide a method of manufacturing a printed wiring board, which is characterized in that a metal film can be formed on the circuit patterns at a time by electroplating without the formation of a resist film on a conductive layer extending between circuit patterns isolated from each other, and after the electroplating the conductive layer can be easily removed with reliability to provide electrical insulation between the circuit patterns. That is, the method of the present invention comprises the steps of: 0011 providing a substrate with at least one of a projection and a concave; 0012 forming a first circuit pattern on the substrate; 0013 forming a second circuit pattern isolated from the first circuit pattern on the substrate; 0014 wherein when the substrate has the projection, the method comprises the steps of: 0015 forming a first conductive layer on the projection to make a temporary electrical connection between the first and second circuit patterns; 0016 performing electroplating by the passage of electric current through the first and second circuit patterns connected by the first conductive layer to simultaneously form a metal film on the first and second circuit patterns; and 0017 after the electroplating, removing the first conductive layer on the projection to provide electrical insulation between the first and second circuit patterns; 0018 wherein when the substrate has the concave, the method comprises the steps of: 0019 covering the concave with a material different from the substrate to obtain a cover portion; 0020 forming a second conductive layer on the cover portion to make a temporary electrical connection between the first and second circuit patterns; 0021 performing electroplating by the passage of electric current through the first and second circuit patterns connected by the second conductive layer to simultaneously form a metal film on the first and second circuit patterns; and 0022 after the electroplating, removing the second conductive layer on the cover portion to provide electrical insulation between the first and second circuit patterns. 0023 It is preferred that substrate with at least one of the projection and the concave is formed by means of integral molding. 0024 It is also preferred that the substrate has a plurality of projections, which are formed such that tops of the projections are substantially flush with each other. 0025 To improve manufacturing efficiency, it is particularly preferred that the first circuit pattern, the second circuit pattern and the first conductive layer are provided at a time by patterning a metal thin film formed on the substrate. Similarly, when the substrate has the concave, it is preferred that the first circuit pattern, the second circuit pattern and the second conductive layer are provided at a time by patterning a metal thin film formed on the substrate after the concave is covered with the material. 0026 In addition, the present invention presents a method of more efficiently manufacturing the printed circuit board. That is, the method comprises: 0027 forming a metal thin film on a substrate having a projection; 0028 providing an initial circuit pattern on the substrate by patterning the metal thin film, the initial circuit pattern comprising first and second circuit patterns isolated from each other and a conductive layer formed on the projection to make a temporary electrical connection between the first and second circuit patterns; 0029 performing electroplating by the passage of electric current through the initial circuit pattern to form an additional metal film on the initial circuit pattern; and 0030 after the electroplating, removing the conductive layer on the projection to provide electrical insulation between the first and second circuit patterns. 0031 In particular, when it is required to form three-dimensional circuit patterns on a substrate for MID or manufacture a high-density printed wiring board, it is preferred to use the following method of manufacturing a printed wiring board. 0032 That is the method of the present invention comprises the steps of: 0033 providing a substrate with a first surface having a first projection and a second surface extending at a different level from the first surface and having a second projection thereon; 0034 forming a first circuit pattern on the first surface; 0035 forming a second circuit pattern isolated from the first circuit pattern on the second surface; 0036 forming a third circuit pattern isolated from the first and second circuit patterns so as to extend from the first surface to the second surface; 0037 forming a first conductive layer on the first projection to make a temporary electrical connection between the first and third circuit patterns; 0038 forming a second conductive layer on the second projection to make a temporary electrical connection between the second and third circuit patterns; 0039 performing electroplating by the passage of electric current through the first, second and third circuit patterns connected by the first and second conductive layers to simultaneously form a metal film on the first, second and third circuit patterns; and 0040 after the electroplating, removing the first and second conductive layers on the first and second projections to provide electrical insulation among the first, second and third circuit patterns. 0041 In the above method, it is preferred that the first and second projections are formed that a top of the first projection is substantially flush with the top of the second projection, and the first and second conductive layers on the first and second projections are removed at a time. 0042 Another concern of the present invention is to provide a substrate used in the method of the present invention, and having at least one of a projection and a concave, which is adapted to form a conductive layer for making a temporary electrical connection between circuit patterns isolated from each other on the substrate, in order to simultaneously form a metal film on the circuit patterns connected by the conductive layer by electroplating. 0043 In particular, it is preferred that the substrate is provided with a first surface having a first projection and a second surface extending at a different level from the first surface and having a second projection formed such that a top of the first projection is substantially flush with the top of the second projection, and wherein each of the first and second projections is adapted to form a conductive layer for making a temporary electrical connection between circuit patterns isolated from each other on the substrate, in order to simultaneously form a metal film on the circuit patterns connected by the conductive layer by electroplating. 0044 These and still other objects and advantages of the present invention will become more apparent from preferred embodiments of the present invention explained in detail below, referring to the attached drawings. 0045 The present disclosure relates to subject matters contained in Japanese Patent applications No. 2001-151382 and No. 2001-151383, which were filed on May 21, 2001, the disclosure of which is expressly incorporated herein by reference in its entirety.

BRIEF EXPLANATION OF THE DRAWINGS 0046 FIGS. 1A and 1B are schematic perspective and cross-sectional views of a substrate used in a method of manufacturing a printed wiring board according to a first embodiment of the present invention; 0047 FIGS. 2A to 2D are schematic perspective views showing the method according to the first embodiment of the present invention; 0048 FIGS. 3A to 3C are schematic cross-sectional views showing a step of removing a conductive layer by chemical etching in the method of the first embodiment; 0049 FIGS. 4A to 4C are schematic perspective views of patterns of the conductive layer formed on a projection of the substrate; 0050 FIGS. 5A and 5B are schematic perspective views showing a step of cutting the projection having the conductive layer at notches; 0051 FIGS. 6A and 6B are schematic perspective views showing a step of peeling off the projection having the conductive layer from the substrate; 0052 FIGS. 7A to 7G show a variety of notch shapes formed in the conductive layer; 0053 FIGS. 8A and 8B are perspective views showing a modification of the step of cutting the projection having the conductive layer; 0054 FIGS. 9A and 9B are perspective views showing another modification of the step of cutting the projection having the conductive layer; 0055 FIGS. 10A and 10B are perspective views showing another modification of the step of cutting the projection having the conductive layer; 0056 FIGS. 11A and 11B are perspective views showing another modification of the step of cutting the projection having the conductive layer; 0057 FIGS. 12A and 12B are schematic cross-sectional views showing a method of manufacturing a printed wiring board according to a second embodiment of the present invention; 0058 FIGS. 13A and 13B are schematic perspective and cross-sectional views of a substrate used in a method of manufacturing a printed wiring board according to a third embodiment of the present invention; 0059 FIGS. 14A to 14D are schematic perspective views showing the method according to the third embodiment of the present invention; 0060 FIG. 15 shows a modification of the step of removing the conductive layer in the method of the third embodiment; 0061 FIG. 16 is a cross-sectional view showing a further modification of the step of removing the conductive layer in the method of the third embodiment; 0062 FIG. 17 shows a step of peeling off a cover portion with a conductive layer from a concave in the method of the third embodiment; 0063 FIG. 18 shows a step of removing a conductive layer with notches from a concave in the method of the third embodiment; 0064 FIG. 19 shows a modification of the step of removing the conductive layer in the method of the third embodiment; 0065 FIG. 20 is a perspective view of a printed wiring board with circuit patterns isolated from each other; and 0066 FIGS. 21A to 21C are schematic perspective views showing a method of manufacturing a printed wiring board disclosed in U.S. Pat. No. 5,494,781.

PREFERRED EMBODIMENTS OF THE INVENTION 0067 A method of manufacturing a printed wiring board of the present invention is explained in detail below according to preferred embodiments.

(First Embodiment) 0068 A substrate used in the first embodiment is shown in FIG. 1A. The substrate 1 is provided with a first surface 10 having a first projection 12, a second surface 20 having a second projection 22, and an oblique surface 14 extending between the first and second surfaces. Therefore, the second surface extends at a different level from the first surface. As shown in FIG. 1B, heights of the first and second projections (12, 22) are determined such that a top of the first projection 12 is substantially flush with the top of the second projection 22. It is preferred that those projections are integrally formed with the substrate 1 by means of injection molding. 0069 As shown in FIG. 2A, first and second circuit patterns (30, 32) isolated from each other are respectively formed on the first and second surfaces (10, 20) of the substrate 1. In addition, a third circuit pattern 34 isolated from the first and second circuit patterns (30, 32) is formed to extend from the first surface 10 to the second surface 20 through the oblique surface 14. Then, as shown in FIG. 2B, a first conductive layer 40 is formed on the first projection 12 to make a temporary electrical connection between the first and third circuit patterns (30, 34), and similarly a second conductive layer 42 is formed on the second projection 22 to make a temporary electrical connection between the second and third circuit patterns (32, 34). The first and second conductive layers (40, 42) are used only in a step of electroplating described below. 0070 Next, as shown in FIG. 2C, electroplating such as copper electroplating is performed by the passage of electric current through the first, second and third circuit patterns (30, 32, 34) connected by the first and second conductive layers (40, 42) to simultaneously form an additional metal (copper) film 50 having a desired thickness on those circuit patterns. For example, when the electric current is supplied to the third circuit pattern 34, it flows to the first circuit pattern 30 through the first conductive layer 40 on the first projection 12, and at the same time flows to the second circuit pattern 32 through the second conductive layer 42 on the second projection 22, 0071 After the electroplating, the additional metal film 50 and the first and second conductive layers (40, 42) on the first and second projections (12, 22) are removed to provide electrical insulation among the first, second and third circuit patterns (30, 32, 34), as shown in FIG. 2D. 0072 For example, it is preferred to remove those conductive layers (40, 42) and the additional metal film 50 by means of chemical etching. In this case, there is an advantage of preventing the occurrence of mechanical damages to the substrate 1 or the circuit patterns (30, 32, 34). In particular, as shown in FIGS. 3A to 3C, when the top of the first projection 12 is substantially flush with the top of the second projection 22, it is possible to simultaneously remove the conductive layers (40, 42) by dipping only the tops of those projections (12, 22) in an etching solution 80. This presents further improvement in the manufacturing efficiency. 0073 Alternatively, those conductive layers (40, 42) and the additional metal film 50 may be mechanically removed by grinding or cutting. For example, when removing the respective conductive layer (40, 42) together with at least a part of the corresponding projection (12, 22) from the substrate 1, there is an advantage of providing the electrical insulation between the circuit patterns with reliability without short circuit resulting from a residue of the conductive layer on the top of the projection. In addition, when the top of the first projection 12 is substantially flush with the top of the second projection 22, the conductive layers (12, 22) can be removed at a time by cutting the projections at a constant cutting depth with a grinding wheel. Therefore, the working efficiency is remarkably improved, as compared with the case of individually determining an optimum cutting depth of the grinding wheel with respect to each of the projections. 0074 In the above method, to improve manufacturing efficiency, it is particularly preferred that the formation of the first, second and third circuit patterns (30, 32, 34) and the formation of the first and second conductive layers (40, 42) are performed at a time. That is, a metal thin film is formed first on the substrate 1 having first and second projection (12, 22). Then an initial circuit pattern is formed on the substrate by patterning the metal thin film. The initial circuit pattern comprising the first, second and third circuit patterns (30, 32, 34) isolated from each other, the first conductive layer 40 formed on the projection 12 to make the electrical connection between the first and third circuit patterns (30, 34) and the second conductive layer 42 formed on the projection 22 to make the electrical connection between the second and third circuit patterns (32, 34). Subsequently, electroplating is performed by the passage of electric current through the initial circuit pattern to form an additional metal film 50 on the initial circuit pattern. After the electroplating, the conductive layers (40, 42) on the projections are removed to provide electrical insulation among those circuit patterns. As the patterning method, it is preferred that required regions of the metal thin film are removed by irradiating a laser beam along a predetermined pattern. According to this method, it is possible to efficiently form a high-density pattern of the metal thin film with accuracy. 0075 In this embodiment, as shown in FIG. 2A, the first, second and third circuit patterns (30, 32, 34) are formed on the substrate 1. However, if necessary, an additional circuit pattern(s) may be formed on the substrate. When forming such an additional circuit pattern, the substrate may have at least one surface that extends at a different level from the first and second surfaces. In this case, it is preferred that additional projections are formed on the surfaces other than the first and second surfaces (10, 20) so as to be substantially flush with the first and second projections (12, 22). 0076 If necessary, a plurality of conductive layers 40 may be formed on a single projection 12, as shown in FIGS. 4A to 4C. In this case, it is possible to increase a degree of flexibility in circuit design by reducing a total number of projections to be formed on the substrate 1. Therefore, these are particularly effective to manufacture a high-density printed wiring board. In addition, there is an advantage that the conductive layers can be efficiently removed after the electroplating. 0077 In place of the substrate 1 with the projections (12, 22) formed by integral molding, those projections may be formed at required positions on a substrate by means of secondary molding. When the projection is made from a resin material different from the substrate material, the projection having the conductive layer thereon can be easily removed from the substrate by use of a tool and so on. In this case, the electrical insulation between the circuit patterns can be provided with reliability. In addition, since the occurrence of residual flash and chips of the resin material is prevented, there is an advantage of simplifying a subsequent cleaning step. As the secondary molding, for example, it is preferred to use a dispense system for supplying a resin from a needle nozzle by air pressure, or an ink-jet system for spraying the resin at a required area. 0078 As another method of removing the projection formed by the secondary molding from the substrate, it is possible to give shocks or vibrations to the projection, or blast a fluid such as water or air on the projection under high speed and high pressure. In addition, when the projection is made from a resin material having a coefficient of thermal expansion much different from the substrate material, it is possible to peel off the projection with the conductive layer from the substrate by alternately blowing hot and cold airs on the projection. To facilitate the easiness of peeling off the projection from the substrate, it is preferred to provide a layer of a release agent such as polyethylene, silicone resin or the like between the substrate and the projection. 0079 As a modification of the present embodiment, it is preferred to form notches at required positions of the conductive layer to improve the easiness of removing the conductive layer by cutting or grinding, and minimize the occurrence of residual flash at the cutting sections. For example, when the conductive layer 40 extends through opposite side walls and the top of the projection 12 in a straight direction, as shown in FIG. 5A, it is preferred to form a narrow width region 41 of the conductive layer on each of the side walls of the projection 12. In this case, as shown in FIG. 5B, an upper portion of the projection 12 with the conductive layer 40 is cut horizontally at a height of the narrow-width region 41 of the conductive layer by a grinding wheel 82. Alternatively, narrow-width regions 41 may be formed in the conductive layer 40 on the substrate 1 at the opposite sides of the projections 12, as shown in FIG. 6A. In this case, by peeling off the projection 12 with the conductive layer 40 from the substrate 1 with use of a tool 84, as shown in FIG. 6B, the conductive layer 40 can be easily cut at the narrow-width regions 41. Another notch shapes preferable in the present invention are also shown in FIGS. 7A to 7G. 0080 In the step of cutting the projection with the conductive layer, to prevent the occurrence of residual flash or peeling at the cutting sections, it is preferred to remove the first conductive layer together with a part of the projection by allowing a cutting or grinding tool to cut into a side surface having the first conductive layer of the projection such that an edge of the cutting or grinding tool presses the first conductive layer against the side surface of the projection, and allowing the cutting or grinding tool to pass through the projection in a direction from the side surface having the first conductive layer of the projection to another side surface not having the first conductive layer of the projection. For example, when the conductive layer 40 is formed on adjacent side walls of the projection 12 by changing the direction of the conductive layer at a required angle () on the top of the projection, as shown in FIG. 8A, it is preferred to cut the projection 12 by allowing the grinding wheel 82 to pass through the projection in a direction from an edge between the adjacent side walls having the conductive layers to an opposite edge between adjacent side walls not having the conductive layers, to thereby provide electrical insulation between the circuit patterns, as shown in FIG. 8B. Alternatively, when the conductive layer 40 is formed on a side surface of the projection 12 in a U-turn manner without the formation of the conductive layer on the top of the projection, as shown in FIG. 9A, it is preferred to cut the projection by allowing the grinding wheel 82 to pass through the projection from the side wall with the conductive layer to the opposite side wall with no conductive layer, to thereby provide electrical insulation between the circuit patterns, as shown in FIG. 9B. 0081 On the other hand, when the upper portion of the projection 12 is cut by allowing the grinding wheel 82 to pass through the projection in a direction substantially equal to the direction of the conductive layer 40, as shown in FIG. 10A, there is a fear that peeling 70 of the conductive layer 40 occurs at a side surface of the projection from which the grinding wheel 82 comes out, as shown in FIG. 10B. In addition, when the upper portion of the projection 12 is cut by allowing the grinding wheel 82 to pass through the projection in a direction substantially rectangular to the direction of the conductive layer, as shown in FIG. 11A, there is a fear that residual flash 71 of the conductive layer left on the projection occurs at the cutting section, as shown in FIG. 11B. 0082 In the case of FIG. 8A, an angle () between the traveling direction of the grinding wheel 82 and the direction of the conductive layer 40 is approximately 45. To effectively prevent the occurrence of the residual flash and peeling at the cutting sections, it is preferred that the angle () is within a range of 0<()80, and more preferably 0<()60. In the case of FIG. 9A, the traveling direction of the grinding wheel 82 is substantially equal to the direction of the conductive layer 40. However, since the conductive layer 40 having the U-turn shape is formed on the side surface of the projection 12, and no conductive layer is formed on the opposite side surface of the projection from which the grinding wheel 82 comes out, there is no worry about the occurrence of peeling 70 of the conductive layer 40 left on the projection.

(Second Embodiment) 0083 In this embodiment, as shown in FIG. 12A, a top surface of the substrate 1 is used to form first and second circuit patterns (30, 32) isolated from each other. The substrate 1 has a projection 12 on its bottom surface. In addition, a conductive layer 40 is formed on the bottom surface of the substrate 1 through the projection 12. The first circuit pattern 30 is electrically connected to the conductive layer 40 on the bottom surface of the substrate by a conductive pin 52 passing through the substrate 1. Similarly, the second circuit pattern 32 is electrically connected to the conductive layer 40 on the bottom surface of the substrate by a conductive pin 54 passing through the substrate 1. Therefore, by use of the conductive pins (52, 54) and the conductive layer 40 extending between the pins through the projection 12, a temporary electrical connection between the first circuit pattern 30 and the second circuit pattern 32 is obtained. In place of the conductive pin, a plated through-hole may be used. 0084 Subsequently, electroplating such as copper electroplating is performed by the passage of electric current through the first and second circuit patterns (30, 32) connected by the conductive pins (52, 54) and the conductive layer 40 to simultaneously form an additional metal (copper) film (not shown) having a desired thickness on these circuit patterns on the top of the substrate 1. After the electroplating, the conductive layer 40 on the projection 12 is removed to provide electrical insulation between the first and second circuit patterns (30, 32), as shown in FIG. 12B. 0085 In this case, since the circuit patterns (30, 32) can be designed on the top surface of the substrate 1 without consideration of a space required to form the projection 12, a degree of flexibility in circuit design can be remarkably improved. Therefore, this embodiment is particularly effective to form high density circuit patterns. In addition, there is an advantage that an operation of mounting electronic parts on the top surface of the substrate 1 is not hindered by the presence of projection 12. Moreover, in the step of mechanically removing the conductive layer 40 on the projection 12 on the bottom surface of the substrate 1 by use of cutting tool such as the grinding wheel 82, it is possible to minimize the occurrence of damages to the circuit patterns (30, 32) on the top surface of the substrate 1. This presents an improvement in production yields.

(Third Embodiment) 0086 As shown in FIGS. 13A and 13B, a substrate 1 used in the third embodiment has a concave 13 in its top surface. It is preferred that the concave 13 is integrally formed with the substrate 1 by means of injection molding. As in the case of the first embodiment, the substrate 1 is provided with a first surface 10, a second surface 20, and an oblique surface extending between the first and second surfaces. Therefore, the second surface 20 extends at a different level from the first surface 10. The concave 13 is covered with a material different from the substrate 1 to obtain a cover portion 15, as shown in FIG. 14A. For example, the cover portion 15 can be obtained by building a bridge over the concave 13 with use of a film of 60 an electrical insulating material. Alternatively, the cover portion 15 may be formed by filling an electrical insulating material 62 in the concave 13 such that a top surface of the cover portion is substantially flush with the top surface of the substrate around the cover portion, as shown in FIG. 15. 0087 In addition, on the top surface of the substrate 1, first, second and third circuit patterns (30, 32, 34) isolated from each other are formed, as shown in FIG. 14A. As shown in FIG. 14B, conductive layers 40, 42 are formed on the cover portions 15 to make temporary electrical connections between the first and third circuit patterns (30, 34) and between the second and third circuit patterns (32, 34), respectively. The conductive layers 40, 42 are used only in the step of electroplating described below. 0088 Next, as shown in FIG. 14C, electroplating such as copper electroplating is performed by the passage of electric current through the first, second and third circuit patterns (30, 32, 34) connected by the conductive layers 40, 42 to simultaneously form an additional metal film 50 on those circuit patterns. For example, when the electric current is supplied to the third circuit pattern 34, it flows to the first circuit pattern 30 through the conductive layer 40 on the cover portion 15, and at the same time flows to the second circuit pattern 32 through the conductive layer 42 on the cover portion 15. As described above, by removing the conductive layers 40, 42 on the cover portions 15 after the electroplating, the electrical insulation among the first, second and third circuit patterns (30, 32, 34) with the additional metal film 50 is obtained. In FIG. 14D, the insulation films 60 having the conductive layers (40, 42) are removed from the concaves 13. 0089 To remove the conductive layers 40, 42, for example, it is possible to use grinding or cutting. In this case, it is preferred to remove the conductive layer (40, 42) together with at least a part of the cover portion 15 from the substrate 1. There is an advantage of preventing short circuit resulting from a residue of the conductive layer (40, 42) on the cover portion 15 with reliability. Alternatively, the conductive layer (40, 42) may be removed together with the part of the cover portion by drilling. In the case of forming the cover portion 15 with use of the electrically insulating film 60, as shown in FIG. 14A, since there is an air space under the insulation film 60 in the concave 13, it is possible to easily provide the electrical insulation between the circuit patterns by punching the conductive layer 40 on the insulation film 60 with use of a punching machine 86, as shown in FIG. 16. In addition, when simultaneously punching a plurality of the conductive layers (40, 42) with the punching machine 86, it is possible to efficiently obtain the electrical insulation among the circuit patterns. 0090 In the above method, to improve manufacturing efficiency, it is particularly preferred that the formation of the first, second and third circuit patterns (30, 32, 34) and the formation of the conductive layers (40, 42) are performed at a time. That is, after the concave 13 is covered with a material different from the substrate 1 to obtain a cover portion 15, a metal thin film is formed on the substrate 1. Then, an initial circuit pattern is formed on the substrate by patterning the metal thin film. The initial circuit pattern comprises the first, second and the third circuit patterns (30, 32, 34) isolated from each other, and the conductive layers (40, 42) formed on the cover portions 15 to make temporary electrical connections between the first and third circuit patterns (30, 34) and between the second and third circuit patterns (32, 34), respectively. Subsequently, electroplating is performed by the passage of electric current through the initial circuit pattern to form an additional metal film 50 on the initial circuit pattern. After the electroplating, the conductive layers (40, 42) on the cover portions 15 are removed to provide electrical insulation among the first, second and third circuit patterns (30, 32, 34) with the additional metal films 50. As the patterning method, it is preferred that required regions of the metal thin film are removed by irradiating a laser beam along a predetermined pattern. According to this method, it is possible to efficiently form a high-density pattern of the metal thin film with accuracy. 0091 If necessary, a plurality of conductive layers may be formed on a single cover portion. In this case, it is possible to increase a degree of flexibility in circuit design by reducing a total number of concaves to be formed in the substrate. In addition, there is an advantage of efficiently performing the step of removing the conductive layers after the electroplating. 0092 As a modification of the present embodiment, as shown in FIG. 17, the cover portion 15 may be formed by use of an electrical insulating resin 62 such that a dome-like projection 17 of the insulating resin is formed above the concave 13, and an air space in the concave is maintained under the dome-like projection 17. The conductive layer 40 is formed on the dome-like projection 17. Due to a reduced contact area between the dome-like projection 17 and the substrate 1, the dome-like projection 17 with the conductive layer 40 can be easily peeled off from the substrate 1 by applying a small external force to the dome-like projection. 0093 In addition, as shown in FIG. 18, it is preferred that the conductive layer 40 extending on the cover portion 15 has notches 41 at opposite ends of the cover portion in a direction of the conductive layer. In this case, a region of the conductive layer 40 between the notches 41 is removed to provide electrical insulation between the first and second circuit patterns. The formation of these notches 41 is effective to prevent the occurrence of residual flash or peeling of the conductive layer 40 left on the substrate 1. 0094 In the case of forming the cover portion 15 by filling the electrical insulating material 62 in the concave 13, it is preferred to leave air spaces 19 at the opposite sides of the cover portion 15 in the concave 13, as shown in FIG. 19. A used amount of the electrical insulating material 62 can be saved. For example, by removing the conductive layer 40 with a part of the cover portion 15 by use of a cutting tool, the electrical insulation between the circuit patterns is provided. Alternatively, the cover portion 15 with the conductive layer may be peeled off from the concave 13 by use of a tool inserted into the air space(s) 19. 0095 In the case of requiring a plurality of cover portions, the cover portions may be formed by means of secondary molding. In this case, it is possible to fill the electrical insulation material in required concaves at a time. As the secondary molding, for example, it is preferred to use a dispense system for supplying a resin from a needle nozzle by air pressure, or an ink-jet system for spraying the resin at a required area. When the cover portion is formed by use of a resin material different from the substrate material, the cover portion with the conductive layer can be easily peeled off from the concave by use of a tool and so on. When the cover portion has a hook to which a tool can be readily engaged, the step of peeling off the cover portion from the concave is further facilitated. In addition, since the occurrence of residual flash and chips of the resin material is prevented, there is an advantage of simplifying a subsequent cleaning step. 0096 In the case of peeling off the cover portion with the conductive layer from the concave of the substrate, for example, it is preferred to give shocks or vibrations to the cover portion, or blast a fluid such as water or air on the cover portion under high speed and high pressure. In addition, when the cover portion is formed by filling a resin material having a coefficient of thermal expansion much different from the substrate material in the concave, it is possible to peel off the cover portion from the concave by alternately blowing hot and cold airs on the cover portion. In this case, there is an advantage of preventing the occurrence of residual flash or peeling of the conductive layer left on the substrate. Moreover, to facilitate the easiness of peeling off the cover portion from the substrate, it is preferred to form the cover portion after providing a layer of a release agent such as polyethylene, silicone resin or the like in the concave.