Through array contact (TAC) for three-dimensional memory devices | Patent Number 10937806

US 10937806 B2
Application Number16867404
Publication NumberUS 20200266211 A1
Pendency10 months, 1 day
Filled DateMay 5, 2020
Priority DateMay 3, 2018
Publication DateAug 20, 2020
Expiration DateMay 2, 2038
Inventor/ApplicantsMei Lan Guo
Qian Tao
Qian TAO
Qinxiang Wei
Zhenyu Lu
Xiaowang Dai
EnBo Wang
Jian Hua Sun
Yushi Hu
Li Hong Xiao
Zhao Hui Tang
Sha Sha Liu
Qianbing Xu
Yu Ting Zhou
ZhiWu Tang
ExaminesCHOI, CALVIN Y
Art Unit2812
Technology Center2800
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