Through array contact (TAC) for three-dimensional memory devices | Patent Number 10658378

US 10658378 B2
Application Number16047182
Publication NumberUS 20190341399 A1
Pendency1 year, 9 months, 27 days
Filled DateJul 27, 2018
Priority DateMay 3, 2018
Publication DateNov 7, 2019
Expiration DateMay 2, 2038
Inventor/ApplicantsYu Ting ZHOU
ZhiWu TANG
Enbo WANG
Qianbing Xu
Qian TAO
Xiaowang DAI
Jian Hua SUN
ZhiWu Tang
Sha Sha Liu
Mei Lan Guo
Qinxiang Wei
Xiaowang Dai
Yu Ting Zhou
Li Hong Xiao
Zhao Hui Tang
Zhenyu Lu
Sha Sha LIU
Yushi HU
Qinxiang WEI
Qianbing XU
Zhao Hui TANG
Qian Tao
Yushi Hu
Jian Hua Sun
Zhenyu LU
Li Hong XIAO
Enbo Wang
Mei Lan GUO
ExaminesCHOI, CALVIN Y
Art Unit2812
Technology Center2800
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