Coating of a polymer layer using low power pulsed plasma in a plasma chamber of a large volume | Patent Number 08389070
US 08389070 B2Filled DateMar 18, 2005
Priority DateMar 18, 2005
Publication DateOct 23, 2008
Expiration DateMar 17, 2025
Inventor/ApplicantsStephen Richard Coulson
John Henry Sambell
Ian Burnett
John Henry Sambell
Ian Burnett
ExaminesYANG, JIE
Art Unit1733
Technology Center1700
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