Coating of a polymer layer using low power pulsed plasma in a plasma chamber of a large volume | Patent Number 08389070

US 08389070 B2
Application Number10593207
Publication NumberUS 20080260965 A1
Pendency7 years, 11 months, 24 days
Filled DateMar 18, 2005
Priority DateMar 18, 2005
Publication DateOct 23, 2008
Expiration DateMar 17, 2025
Inventor/ApplicantsJohn Henry Sambell
Ian Burnett
Stephen Richard Coulson
ExaminesYANG, JIE
Art Unit1733
Technology Center1700
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