Nanoparticle-based etching of silicon surfaces | Patent Number 08075792

US 08075792 B1
Application Number12053372
Publication Number-
Pendency3 years, 8 months, 27 days
Filled DateMar 21, 2008
Priority DateMar 21, 2008
Publication Date-
Expiration DateMar 20, 2028
Inventor/ApplicantsDaniel Meier
Howard Branz
Anna Duda
David S. Ginley
James S. Ward
Vernon Yost
ExaminesANGADI, MAKI A
Art Unit1713
Technology Center1700
Assignments
Vertellus Specialties Inc.
Current
Battelle Energy Alliance
Original
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