Use of corrosion inhibiting compounds to inhibit corrosion of metal plugs in chemical-mechanical polishing | Patent Number 06068879

US 06068879 NA
Application Number8918360
Publication Number-
Pendency2 years, 9 months, 8 days
Filled DateAug 26, 1997
Priority DateAug 26, 1997
Publication Date-
Expiration DateAug 26, 2017
Inventor/Applicants Nicholas F. Pasch
ExaminesTALBOT, BRIAN K
Art Unit1762
Technology Center1700
Assignments
Hilco Patent Acquisition 55 Llc
Current
Bellnorthern Research
Current
Bell Semiconductor Llc
Current
Lsi Logic Corporation
Original
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