200 is removably mounted or coupled to the nozzle structure 202. The nozzle gasket 200 includes a deformable structure 204 at a first end 206 of the nozzle gasket 200, which is an upper end of the nozzle gasket 200 based on the orientation as shown in FIG. 3A. The deformable structure 204 contacts the container 102 when the container 102 is positioned, loaded, or mounted on the reception region 106 of the purge load port 100. For example, the deformable structure 204 contacts the mounting surface 130 of the container 102 to form a seal between the respective outlet or inlet of the container overlapping and aligned with a corresponding purge nozzle of the plurality of purge nozzles 122a, 122b, 122c, 122d. The nozzle gasket 200 further includes a base structure 208 at a second end 210 of the nozzle gasket 200, which is a lower end of the nozzle gasket 200 based on the orientation as shown in FIG. 3A. The second end 210 of the nozzle gasket 200 is opposite to the first end 206 of nozzle gasket 200. The deformable structure 204 in FIG. 3A is in an undeformed state in which the container 102 is not present on the nozzle gasket 200 such that the deformable structure 204 of the nozzle gasket 200 is undeformed (i.e., not deformed).

The nozzle structure 202 includes a base 212 with a base surface 214 that abuts the second end 210 of the nozzle gasket 200 and includes a nozzle 216 that protrudes from the base surface 214 of the base 212. The nozzle 216 of the nozzle structure 202 is within the nozzle gasket 200 such that the nozzle gasket 200 extends around the nozzle 216. The nozzle 216 includes a third end 218 at which the nozzle 216 terminates.

The nozzle structure 202 further includes a nozzle opening or hole 220 that extends into the third end 218 of nozzle 216 and is an inlet or outlet through which the purging fluid may exit or enter, respectively. For example, as the first pair of nozzles 122a, 122b of the plurality of purge nozzles 122a, 122b, 122c, 122d eject the purging fluid, the corresponding ones of the nozzle holes 220 that correspond to the first pair of nozzles 122a, 122b are outlets for the purging fluid to exit, and, alternatively, as the second pair of nozzles 122c, 122d of the plurality of purge nozzles 122a, 122b, 122, 122d receive the purging fluid, the corresponding ones of the nozzles holes 220 that correspond to the second pair of nozzles 122c, 122d are inlets for the purging fluid to enter.

FIG. 3B is a cross-sectional, perspective view of the nozzle gasket 200 and the nozzle structure 202 taken along line A-A as shown in FIG. 3A. The nozzle gasket 200 is in the undeformed state in FIG. 3B, which is representative of when the container 102 is not present on the nozzle gasket 200 as the container 102 is not present on the reception region 106 of the purge load port 100.

The deformable structure 204 of the nozzle gasket 200 includes a first portion 222 and a second portion 224, and the first portion 222 and the second portion 224 are transverse to each other by a first angle 226. The first portion 222 extends from the first end 206 of the nozzle gasket 200 to the second portion 224 of the nozzle gasket 200. The second portion 224 extends from the first portion 222 to the base structure 208. In other words, the second portion 224 is between the first portion 222 and the base structure 208. The first portion 222 may be referred to as an upper portion, the second portion 224 may be referred to as an intermediate portion, and the base structure 208 may be referred to as a lower portion. When the first portion 222 and the second portion 224 are in the undeformed state, the first portion 222 and the second portion 224 are substantially straight relative to when the first portion 222 and the second portion 224 are in a deformed state (see FIG. 3C).

The nozzle 216 includes a lip portion 228 at the third end 218 of the nozzle 216. The base structure 208 of the nozzle gasket 200 is structured to be inserted into a space 230 between the lip portion 228 and the base surface 214 of the base 212. The base structure 208 interlocks with the lip portion 228 such that the nozzle gasket 200 is removably mounted or coupled to the nozzle 216 of the nozzle structure 202.

FIG. 3C is a cross-sectional, perspective view of the nozzle gasket 200 and the nozzle structure 202 taken along A-A as shown in FIG. 3A. The nozzle gasket 200 is in the deformed state in FIG. 3C, which is representative of when the container 102 is present on the nozzle gasket 200 as the container 102 is present on the reception region 106 of the purge load port 100.

When the deformable structure 204 is in the deformed state as shown in FIG. 3C, the first portion 222 and the second portion 224 of the deformable structure 204 of the nozzle gasket 200 are pushed down by the container 102 due to the container 102 being present on the first portion 222 of the deformable structure 204 of the nozzle gasket 200. This downward force due to the weight of the container 102 on the nozzle gasket 200 when the container 102 is present on the reception region 106 of the purge load port 100 results in the first portion 222 and the second portion 224 both deforming and becoming curved as shown in FIG. 3C. When the first portion 222 and the second portion 224 are deformed and become curved, the first angle 226 reduces as compared to when the first portion 222 and the second portion 224 are in the undeformed state as shown in FIG. 3B.

As the deformable structure 204 is at the first end of the nozzle gasket 200, the deformable structure 204 forms a seal with the container 102 when the container 102 is present on the reception region 106 of the purge load port 100. Once the seal is formed between the nozzle gasket 200 and the container 102, the purging fluid is introduced into the internal chamber 104 of the container 102. As the purging fluid is introduced into the internal chamber 104 through the first pair of nozzles 122a, 122b of the plurality of purge nozzles 122a, 122b, 122c, 122d, the purging fluid passing through the deformable structure 204 in the deformed state causes vibration in the first portion 222 and the second portion 224 of the deformable structure 204. This vibration in the first and second portions 222, 224 causes the seal between the first end 206 of the nozzle gasket 200 with the container 102 to unseal for short periods of time allowing for at least some of the purging fluid to escape or leak between the first end of the nozzle gasket 200 and the container 102 into an environment external to the container 102 instead of being introduced into the internal chamber 104.

Similarly, the purging fluid is allowed to exit the internal chamber 104 through the second pair of nozzles 122c, 122d of the plurality of purge nozzles 122a, 122b, 122c, 122d, wherein the purging fluid passing through the deformable structure 204 in the deformed state causes vibration of the first portion 222 and the second portion 224. This vibration in the first and second portions 222, 224 causes the seal between the first end 206 of the nozzle gasket 200 with the container 102 to unseal for short periods of time allowing for at least some of the purging fluid to escape or leak between the first end 206 of the nozzle gasket 200 and the container 102 into an environment external to the container 102 instead of being introduced into the internal chamber 104.

The vibration caused by the purging fluid passing through the deformable structures 204 of the nozzle gaskets at the plurality of purge nozzles 122a, 122b, 122c, 122d cause small shifts in the position of the container 102 when present on the reception region 106 of the purge load port. These small shifts in the position of the container 102 may further cause or facilitate the seals between the nozzle gaskets 200 at the plurality of purge nozzles 122a, 122b, 122c, 122d to become unsealed for short periods of time to further cause or facilities escaping or leaking of the purging fluid into the environment external to the container 102 instead of being introduced into the internal chamber 104.

In view of the above discussion, the escaping and leaking of the purging fluid increases costs to operate or run the FAB as the purging fluid is wasted instead of purging or cleaning the internal chamber 104 of the container 102. As is readily apparent in view of the above discussion, the deformable structure 204 being present at the first end 206 of the nozzle gasket 200 such that the deformable structure 204 forms the seal between the nozzle gasket 200 and the container 102 results in at least some of the purging fluid escaping and leaking between the deformable structure 204 of the nozzle gasket 200 and the container 102.

When the container 102 is present on the deformable structure 204 of the nozzle gasket 200, the base structure 208 of the nozzle gasket 200 remains undeformed. When the container 102 is not present on the deformable structure 204 of the nozzle gasket, the base structure 208 of the nozzle gasket 200 remains undeformed. In other words, regardless of whether the container 102 is or is not present on the deformable structure 204 of the nozzle gasket 200, the base structure 208 remains undeformed.

FIG. 4A is a perspective view of a nozzle gasket 300 and a nozzle or nozzle structure 302, in accordance with some embodiments, that are usable at the plurality of purge nozzles 122a, 122b, 122c, 122d of the purge load port, in accordance with some embodiments. As will become readily apparent in view of the following discussion with respect to FIGS. 4A-4E, utilizing the nozzle gasket 300 and the nozzle structure 302, in accordance with some embodiments, instead of the nozzle gasket 200 and the nozzle structure 202 prevents or reduces the likelihood of the purging fluid escaping or leaking in the fashion as discussed earlier herein when the nozzle gasket 200 and the nozzle structure 202 are utilized. Preventing or reducing this likelihood of the escaping or leaking of the purging fluid by utilizing the nozzle gasket 300 and the nozzle structure 302 instead of the nozzle gasket 200 and the nozzle structure 200 reduces costs to operate and run the FAB.

The nozzle gasket 300 is removably mounted or coupled to the nozzle structure 302. The nozzle gasket 300 includes a sealing structure 304, a mounting structure 306, and a deformable structure 308. The sealing structure 304 is at a first end 310 of the nozzle gasket 300, which is at an upper end of the nozzle gasket 300 based on the orientation of the nozzle gasket 300 as shown in FIG. 4A. The sealing structure 304 contacts the container 102 when the container 102 is positioned, loaded, or mounted on the reception region 106 of the purge load port 100. For example, the sealing structure 304 contacts the mounting surface 130 of the container 102 to form a seal between the respective outlet or inlet of the container overlapping and aligned with a corresponding purge nozzle of the plurality of purge nozzles 122a, 122b, 122c, 122d. The deformable structure 308 of the nozzle gasket 300 is at a second end 312 of the nozzle gasket 300, which is at a lower end of the nozzle gasket 300 based on the orientation of the nozzle gasket 300 as shown in FIG. 4A. The second end 312 is opposite to the first end 310. The mounting structure 306 is between the first end 310 and the second end 312 and is between the sealing structure 304 and the deformable structure 308. The sealing structure 304 may be referred to as an upper portion, the mounting structure 306 may be referred to as an intermediate portion, and the deformable structure 308 may be referred to as a lower portion. The deformable structure 308 in FIG. 4A is in an undeformed state in which the container 102 is not present on the nozzle gasket 300 such that the deformable structure 308 of the nozzle gasket 300 is undeformed (i.e., not deformed).

The nozzle structure 302 includes a base 314 with a base surface 316 that abuts the second end 312 of the nozzle gasket 300 and includes a nozzle 318 that protrudes from base surface 316 of the base 314. The nozzle 318 of the nozzle structure 302 is within the nozzle gasket 300 such that the nozzle gasket 300 extends around the nozzle 318. The nozzle 318 includes a third end 320 at which the nozzle 318 terminates.

The nozzle structure 302 further includes a nozzle opening or hole 322 that extends into the third end 320 of the nozzle 318 and is an inlet or outlet through which the purging fluid may exit or enter, respectively. For example, as the first pair of nozzles 122a, 122b of the plurality of purge nozzles 122a, 122b, 122c, 122d eject the purging fluid, the corresponding ones of the nozzle holes 322 that correspond to the first pair of nozzles 122a, 122b are outlets for the purging fluid to exit, and, alternatively, as the second pair of nozzles 122c, 122d of the plurality of purge nozzles 122a, 122b, 122c, 122d receive the purging fluid, the corresponding ones of the nozzle holes 322 that correspond to the second pair of nozzles 122c, 122d are inlets for the purging fluid to enter. The nozzle holes 322 include a threaded region or portion 324 that is threaded and is configured to, in operation, receive a threaded structure such as a threaded structure of a threaded fastener (see FIGS. 7A and 7B).

The sealing structure 304 further includes a first seal portion 326 and a second seal portion 328 that are spaced apart from each other by a recess 330. As shown in this embodiment of the nozzle gasket as shown in FIG. 3A, the first and second seal portions 326, 328 are annular or ring portions and the recess 330 is an annular or ring recess.

FIG. 4B is a cross-sectional, perspective view of the nozzle gasket 300 and the nozzle structure 302 taken along line B-B as shown in FIG. 4A, in accordance with some embodiments. The nozzle gasket 300 is in the undeformed state in FIG. 4B, which is representative of when the container 102 is not present on the nozzle gasket 300 as the container 102 is not present on the reception region 106 of the purge load port 100.

The deformable structure 308 includes an angled portion 332 that is at a second angle 334 relative to the base surface 316 of the base 314. The angled portion 332 is transverse to the mounting portion 306 by a third angle 336. The angled portion 332 extends from the mounting portion 306 to the base surface 316 of the base 314. When the angled portion 332 of the deformable structure 308 is in the undeformed state, the angled portion 332 of the nozzle gasket 300 is substantially straight relative to when the angled portion 332 of the nozzle gasket 300 is in a deformed state (see FIG. 4C).

The nozzle 318 includes a lip portion or structure 338 at the third end 320 of the nozzle 318. The mounting structure 306 of the nozzle gasket 300 is structured to be inserted into a space 340 between the lip portion 338 and the base surface 316 of the base 314. The mounting structure 306 interlocks with the lip portion 338 such that the nozzle gasket 300 is removably mounted or coupled to the nozzle 318 of the nozzle structure 302.

FIG. 4C is a cross-sectional, perspective view of the nozzle gasket 300 and the nozzle structure 302 taken along line B-B as shown in FIG. 4A, in accordance with some embodiments. FIG. 4D is a cross-sectional, side view of the nozzle gasket 300 and the nozzle structure 302 taken along line B-B as shown in FIG. 4A, in accordance with some embodiments. The nozzle gasket 300 is in the deformed state in FIGS. 4C and 4D, which is representative of when the container 102 is present on the nozzle gasket 300 as the container is present on the reception region 106 of the purge load port 100.

When the deformable structure 308 is in the deformed state as shown in FIG. 4C, the angled portion 332 of the deformable structure 308 of the nozzle gasket 300 is pushed down by the container 102 due to the container 102 being present on the sealing structure 304 of the nozzle gasket 300. This downward force due to the weight of container 102 on the nozzle gasket 300 when the container is present on the reception region 106 of the purge load port 100 results in the angled portion 332 deforming and becoming curved as shown in FIG. 4C. When the angled portion 332 is deformed and becomes curved, the second angle 334 and the third angle 336 are reduced as compared to when the angled portion 332 is in the undeformed state as shown in FIG. 4B.

When the container 102 is present on the sealing structure 304 of the nozzle gasket 300, the mounting structure 306 is moved downward as shown in FIG. 4C due to the deformation in the angled portion 332 of the deformable structure 308. When the container 102 is present on the sealing structure 304 of the nozzle gasket 300, the sealing structure 304 is moved downward as shown in FIG. 4C due to the deformation in the angled portion 332 of the deformable structure 308. However, unlike the deformable structure 204 of the nozzle gasket 200 that is deformed and forms the seal with the container 102 when the container 102 is present on the nozzle gasket 200 as discussed earlier herein with respect to FIG. 3C, the sealing structure 304 of the nozzle gasket 300 forms a seal with the container 102 while remaining substantially undeformed as the sealing structure 304 only moves downward due to the deformation in the angled portion 332 of the deformable structure 308.

As the sealing structure 304 is at the first end 310 of the nozzle gasket 300 and the deformable structure 308 is at the second end 312 unlike the deformable structure 204 being present at the first end 206 of the nozzle gasket 200, the sealing structure 304 forms a seal with the container 102 when the container 102 is present on the reception region load port 100 instead of the deformable structure 308 unlike the nozzle gasket 200. Once the seal is formed between the nozzle gasket 300 and the container 102, the purging fluid is introduced into the internal chamber of the container. As the purging fluid is introduced into the internal chamber 104 through the first pair of nozzles 122a, 122b of the plurality of purge nozzles 122a, 122b, 122c, 122d, unlike the purging fluid passing through the deformable structure 204 of the nozzle gasket 200 as discussed above, the purging fluid only passes through the sealing structure 304 of the nozzle gasket 300 when exiting the nozzle hole 322. As is readily visible in FIGS. 3C and 4B, the sealing structure 304 is closer to the third end 320 of the nozzle 318 than the first portion 222 of the deformable structure 204 of the nozzle gasket is to the third end 218 of the nozzle 216. The sealing structure 304 being closer to the third end reduces a volume of space between the container 102 and the third end 320 of the nozzle 318, which prevents vibration, mitigates vibration, or reduces the likelihood of vibration occurring within the nozzle gasket 300 such that escaping or leaking of the purging fluid from the seal between the sealing structure 304 and the container 102 is prevented, mitigated, or reduced in likelihood of occurring relative to when the nozzle gasket 200 is utilized instead of the nozzle gasket 300.

Even if there is some vibration in the nozzle gasket 300 that may result in some small shifts in position of the container 102 when present on the sealing structure 304 of the nozzle gasket 300, the first and second seal portions 326, 328 along with the recess 330 form a stronger seal with the container relative to the seal between the first portion 222 of the deformable structure of the nozzle gasket 200. As the seal is stronger when utilizing the nozzle gasket 300 instead of the nozzle gasket 200, any escaping or leaking of the purging fluid from the seal between the sealing structure 304 and the container 102 is prevented, mitigated, or reduced in likelihood of occurring when the nozzle gasket 200 is utilized instead of the nozzle gasket 300.

In view of the above discussion, as the deformable structure 308 is present at the second end 312 of the nozzle gasket 300 unlike the deformable structure 204 being at the first end 206 of the nozzle gasket 200, the nozzle gasket 300 forms the stronger seal with the container 102 relative to the seal between the container 102 and the nozzle gasket 200. As the nozzle gasket 300 forms the stronger seal with the container 102, the nozzle gasket 300 further prevents, mitigates, or reduces the likelihood of the purging fluid escaping or leaking from the stronger seal relative to the seal formed between the deformable structure 204 of the nozzle gasket 200 and the container 102 as discussed earlier herein. Further preventing, mitigating, or reducing the likelihood of the purging fluid escaping or leaking by utilizing the nozzle gasket 300 instead of the nozzle gasket 200 reduces costs to operate or run the FAB as none or less of the purging fluid is wasted due escaping or leaking into an environment external to the container 102.

As shown in FIG. 4D, a height H0 extends from a surface 321 at the third end 320 of the nozzle 318. In this embodiment of the nozzle gasket 300 and the nozzle structure 302, the height H0 is greater than or equal to 1.8 millimeters (mm) to provide clearance. This clearance allows for the container 102 to compress the nozzle gasket 300 when positioned, loaded, or mounted on the nozzle gasket 300 while preventing damage to the nozzle 318 of the nozzle structure 302 when the container 102 is on the nozzle gasket 300. Although the above dimension is with respect to the embodiment of the nozzle gasket 300 as shown in FIG. 4D, this dimension of the height H0 may be adjusted in alternative embodiments of the nozzle gasket 300 to further prevent or reduce the likelihood of the purging or cleaning fluid escaping or leaking when utilizing the nozzle gasket 300 and the nozzle structure 302 at the plurality of purge nozzles 122a, 122b, 122c, 122d of the purge load port 100.

FIG. 4E is a cross-sectional, side view of the nozzle gasket 300 when removed from the nozzle structure 302, in accordance with some embodiments. As shown in FIG. 4E, the sealing structure 304, the mounting structure 306, and the deformable structure 308 delimit a reception opening 342, which may be referred to as a through hole. The mounting structure 306 extends around the narrowest region of the reception opening 342. The reception opening 342 is configured to, in operation, receive the nozzle 318 of the nozzle structure 302.

As shown in FIG. 4E, the mounting structure 306 includes a mounting surface 344. The mounting surface 344 abuts the sidewall surface of the nozzle 318 and interlocks with the lip portion 338 to interlock the nozzle gasket 300 to the nozzle 318 when the nozzle gasket 300 is mounted to the nozzle 318 of the nozzle structure 302.

As shown in FIG. 4E, the recess 330 between the first and second seal portions 326, 328 of the sealing structure 304 is at a fourth angle 346 with respect to the first end 310, which includes a sealing surface that forms a seal with the container 102. In other words, the recess 330 extends into the first end 310 of the nozzle gasket 300 at the fourth angle 346 relative the sealing surface of the sealing structure 304 at the first end 310 of the nozzle gasket 300.

As shown in FIG. 4E, the nozzle gasket 300 includes a first point or edge 348 at a lower end of the mounting surface 344 of the mounting structure 306, an external angled surface 350 that extends from the second end 312 to a second point or edge 352, and an internal angled surface 354 that extends from the second end 312 to the mounting structure 306. A first height H1 extends from the second end 312 to the second point 352, a second height H2 extends from the second point or edge 352 to the first end 310, a third heigh H3 that extends from the second end 312 to the first point 348, and a width W1 that extends from the internal angled surface 354 to the external angled surface 350. In this embodiment of the nozzle gasket 300, the ratio of the third height H3 to the width W1 (i.e., H3/W1) may be greater than or equal to 2. In this embodiment, the first height H1 is greater than the second height H2, and the second height H2 is greater than the third height H3. In this embodiment, the first heigh H1 is greater than 2 millimeters (mm). Although the above dimensions and dimensional relationships are with respect to the embodiment of the nozzle gasket 300 as shown in FIG. 4E, these dimensional relationships may be adjusted in alternative embodiments of the nozzle gasket 300 to further prevent or reduce the likelihood of the purging or cleaning fluid escaping or leaking when utilizing the nozzle gasket 300 and the nozzle structure 302 at the plurality of purge nozzles 122a, 122b, 122c, 122d of the purge load port 100.

As shown in FIG. 4E, the first seal portion 326 includes a first inner angled surface 356, which partially delimits the nozzle reception opening 342, and the second seal portion 328 includes a second inner angled surface 358, which partially delimits the recess 330. The first inner angled surface 356 is at a fifth angle 360 with respect to the first end 310 of the nozzle gasket 300, and the second inner angled surface 358 is at a sixth angle 362 with respect to the first end 310 of the nozzle gasket 300. In this embodiment of the nozzle gasket 300, the fifth angle 360 is greater than or equal to 55 degrees, is less than or equal to 95 degrees, or is equal to an angle between 55 and 95 degrees. In this embodiment of the nozzle gasket 300, the sixth angle 362 is greater than the fifth angle 360. Although the above dimensions and dimensional relationships are with respect to the embodiment of the nozzle gasket 300 as shown in FIG. 4E, these dimensional relationships may be adjusted in alternative embodiments of the nozzle gasket 300 to further prevent or reduce the likelihood of the purging or cleaning fluid escaping or leaking when utilizing the nozzle gasket 300 and the nozzle structure 302 at the plurality of purge nozzles 122a, 122b, 122c, 122d of the purge load port 100.

As shown in FIGS. 4B and 4C, the nozzle hole 322 in this embodiment as shown in FIGS. 4B and 4C is aligned with an axis CA. In other words, a respective axis of the nozzle hole 322 is coincident with the axis CA. The axis CA is a central axis of the nozzle structure 302. In some embodiments, the axis CA of the nozzle structure may not be a central axis as it may not be coincident with a center of the nozzle structure 302 as shown in this embodiment in FIGS. 4B and 4C.

FIG. 5 is a flowchart 400 of a method of purging the internal chamber 104 of the container 102 utilizing the purge load port 100 including the nozzle gasket 300 and the nozzle structure 302 being present at the plurality of purge nozzles 122a, 122b, 122c, 122d, in accordance with some embodiments. The flowchart 400 includes a first step 402, a second step 404, and a third step 406.

In the first step 402, the container 102, which contains no workpieces or wafers, is positioned, loaded, and mounted onto the purge load port 100 at the reception region 106. For example, the container 102 is transported to the purge load port by an overhead transport system (OHT) from a location within the FAB to the purge load port 100. Once the container 102 is aligned with the purge load port 100, the container 102 is lowered and positioned, loaded, and mounted onto the purge load port 100. While not shown, the container 102 includes reception structures or openings that are aligned with the guide structure 128 such that the guide structures 128 are inserted into the reception structures or openings. While not shown, the container includes respective inlets that are aligned with the first pair of nozzles 122a, 122b of the plurality of purge nozzles 122a, 122b, 122c, 122d and respective outlets that are aligned with the first pair of nozzles 122a, 122b of the plurality of purge nozzles 122a, 122b, 122c, 122d such that the respective inlets are in fluid communication with the first pair of nozzles 122a, 122b and the respective outlets are in fluid communication with the second pair of nozzles 122c, 122d. The respective inlets and the respective outlets provide access to the internal chamber 104 within the container 102 such that the purging fluid is injected into and passes through the internal chamber 104 of the container 102.

When the container 102 is positioned on the purge load port 100, respective seals are formed at each of the plurality of purge nozzles 122a, 122b, 122c, 122d by respective sealing structures 304 of the nozzle gaskets 300 at each one of the plurality of purge nozzles 122a, 122b, 122c, 122d. For example, at each one of the plurality of purge nozzles 122a, 122b, 122c, 122d, the respective first and second portions 326, 328 of each of the respective sealing structures 304 abuts or contacts a respective surface of the container forming the respective seals such that the purging fluid enters and exits the internal chamber without leaking or escaping between the container 102 and the sealing structures 304 at each one of the plurality of purge nozzles 122a, 122b, 122c, 122d. As the details of the nozzle gaskets 300 forming these seals with the container 102 were discussed earlier herein in detail, for simplicity and brevity sake of the present disclosure, this discussion of the nozzle gaskets 300 more effectively forming seals with the container than the nozzle gaskets 200 is not reproduced herein.

After the first step 402 is complete in which the container 102 is positioned, loaded, or mounted to the purge load port 100, in a second step 404 at least two of respective valves 112a, 112b of the plurality of valves 112a, 112b, 112c are opened such that the purging fluid from the purging or cleaning fluid source 108 is injected into and passes through the container 102. As the purging fluid passes through the internal chamber 104 of the container 102, any residual debris, contaminants, or particulates are removed from the internal chamber 104 such that the internal chamber 104 is purged and cleaned by the purging fluid. Removing the residual debris, contaminants, or particulates prevents or reduces the likelihood of defects in workpieces and wafers that are transported within the container 102 after the internal chamber 104 of the container 102 is purged and removed from the purge load port 100. In at least this embodiment, the purging fluid enters into the internal chamber 104 of the container 102 through the first pair 122a, 122b of the plurality of purge nozzles 122a, 122b, 122c, 122d and exits the internal chamber 104 of the container 102 through the second pair 122c, 122d of the plurality of purge nozzles 122a, 122b, 122c.

After the second step 404 is complete in which the purging fluid is injected into and through the internal chamber 104 of the container to purge and clean the internal chamber 104, in a third step 406 the at least two respective valves 112a, 112b of the plurality of valves 112a, 112b are closed to stop injecting or introducing purging fluid into and through the internal chamber 104. After the purging fluid is no longer being injected into and through the internal chamber 104, the OHT picks up the container 102 and removes the container 102 from the purge load port as the internal chamber