>75 may, for example, include an angle derivation section 75c. The first component and the second component detected by the first detection section 71 and the second detection section 72 are supplied to the angle derivation section 75c of the processor 75. The angle derivation section 75c derives an angle θ (rotational angle) of the vibration of the movable member 10 from the first component and the second component. Based on the angle θ being derived, the first correction operation is performed. For example, the difference between the angle θ being derived and the first direction D1 corresponds to the first angle θ1.

As shown in FIG. 1, the first correction value Vx1 derived by the first correction operation is supplied to the driver 76. The driver 76 includes, for example, a first control signal output section DR1, a second control signal output section DR2, a first voltage output section Ddc1, and a second voltage output section Ddc2. The first control signal output section DR1 supplies the first control signal SR1 to the first resistance element R1. The second control signal output section DR2 supplies the second control signal SR2 to the second resistance element R2. The first voltage output section Ddc1 controls the first voltage Vdc1 of the first end ep1 of the first resistance element R1. The second voltage output section Ddc2 controls the second voltage Vdc2 of the second end ep2 of the second resistance element R2. The first voltage Vdc1 and the second voltage Vdc2 include a direct current component.

For example, a correction value (first correction value Vx1) is supplied to the first control signal output section DR1, the second control signal output section DR2, the first voltage output section Ddc1, and the second voltage output section Ddc2. Thus, the first control signal SR1 being corrected, the second control signal SR2 being corrected, the first voltage Vdc1 being corrected, and the second voltage Vdc2 being corrected are supplied to the sensor element 10U.

In the control operation, the first correction value Vx1 may include at least one of the first resistance value or the second resistance value such that the movable member 10 vibrates along the first direction D1. In this case, the first correction value Vx1 does not need to be supplied to the first voltage output section Ddc1 and the second voltage output section Ddc2.

For example, a capacitive element is formed by the first electrode 11E and the first counter electrode 21E. The first resistance element R1 is connected in series with the capacitive element. For example, a first variable electric damper is formed by the first electrode 11E, the first counter electrode 21E, and the first resistance element R1. For example, the first voltage Vdc1 may change the capacitance of the capacitive element formed by the first electrode 11E and the first counter electrode 21E. For example, the first variable electric damper is formed by the first electrode 11E, the first counter electrode 21E, the first resistance element R1 and the first voltage Vdc1.

For example, a capacitive element is formed by the second electrode 12E and the second counter electrode 22E. The second resistance element R2 is connected in series with the capacitive element. The second variable electric damper, for example, is formed by the second electrode 12E, the second counter electrode 22E, and the second resistance element R2. For example, the second voltage Vdc2 may change the capacitance of the capacitive element formed by the second electrode 12E and the second counter electrode 22E. For example, the second variable electric damper is formed by the second electrode 12E, the second counter electrode 22E, the second resistance element R2 and the second voltage Vdc2.

These variable electric dampers are configured to change the vibration characteristics of the movable member 10. In the first correction operation, it is possible to correct the characteristics of these variable electric dampers.

As shown in FIG. 1, the sensor 110 may include a first counter conductive portion 21C and a second counter conductive portion 22C. The movable member 10 may further include a first conductive portion 11C and a second conductive portion 12C.

The first counter conductive portion 21C faces the first conductive portion 11C. The position of the first counter conductive portion 21C is fixed with respect to the fixed member 10F. For example, the first counter conductive portion 21C is fixed to the base 10s. For example, the first counter conductive portion 21C and the first conductive portion 11C form the first parallel plate electrode pair 11P.

The second counter conductive portion 22C faces the second conductive portion 12C. The position of the second counter conductive portion 22C is fixed with respect to the fixed member 10F. For example, the second counter conductive portion 22C is fixed to the base 10s. For example, the second counter conductive portion 22C and the second conductive portion 12C form the second parallel plate electrode pair 12P.

A third direction D3 from the fixed member 10F to the first conductive portion 11C crosses the first direction D1 and the second direction D2. A fourth direction D4 from the fixed member 10F to the second conductive portion 12C crosses the first direction D1 and the second direction D2. The fourth direction D4 crosses the third direction D3. The third direction D3 and the fourth direction D4 are along a plane including the first direction D1 and the second direction D2.

In the embodiment, the controller 74 is configured to apply the first counter conductive portion voltage Vp1 to the first counter conductive portion 21C. The controller 74 is configured to apply the second counter conductive portion voltage Vp2 to the second counter conductive portion 22C.

In the embodiment, a second correction operation described below may be performed. For example, the controller 74 is configured to further perform the second correction operation when the movable member 10 does not receive an external force. In the second correction operation, the controller 74 generates a second vibration in the movable member 10. The second vibration includes a third component in the third direction D3 and a fourth component in the fourth direction D4. In the second correction operation, the controller 74 may derive a second correction value Vx2 based on the third direction detection result of the third component and the fourth direction detection result of the fourth component (see FIG. 1). The second correction value Vx2 includes at least one of a first counter conductive portion voltage correction value for the first counter conductive portion voltage Vp1 and a second counter conductive portion voltage correction value for the second counter conductive portion voltage Vp2 such that the movable member 10 vibrates along the third direction D3.

The second correction value Vx2 includes, for example, a second angle θ2 (see FIG. 1) of a difference between the direction of the second vibration and the third direction D3. For example, the second correction operation based on the deviation (second angle θ2) from the third direction D3 in the direction of the second vibration is performed.

For example, the shape of at least one of the first parallel plate electrode pair 11P or the second parallel plate electrode pair 12P may include an unintended error due to an error in the manufacturing process or the like. The unintended errors can make the operation using these parallel plate electrode pairs inaccurate.

In the embodiment, the second correction operation is performed. The second correction value Vx2 is obtained by the second correction operation. Based on the second correction value Vx2 being obtained, the operating condition using the parallel plate electrode pair is corrected. Thus, the influence of the error is suppressed. According to the embodiment, a sensor capable of Improving accuracy can be provided.

For example, the operation using the parallel plate electrode pair Includes, for example, a resonance frequency correction operation. The controller 74 is configured to perform a resonance frequency correction operation. In the resonance frequency correction operation, the controller 74 is configured to adjust at least one of the first counter conductive portion voltage Vp1 or the second counter conductive portion voltage Vp2 such that the second absolute value of the difference between the third resonance frequency of the third component and a fourth resonance frequency of the fourth component becomes small.

For example, by the second correction operation based on the second correction value Vx2 (For example, the second angle θ2), at least one of the first counter conductive portion voltage Vp1 and the second counter conductive portion voltage Vp2 is adjusted by correcting the deviation of the resonance frequency. More accurate detection is possible.

As shown in FIG. 1, for example, the driver 76 may include a first control voltage output section Dp1 and a second control voltage output section Dp2. The first control voltage output section Dp1 is connected to the first counter conductive portion 21C by the wiring Lp1, for example. The second control voltage output section Dp2 is connected to the second counter conductive portion 22C by the wiring Lp2, for example. The first control voltage output section Dp1 applies the first counter conductive portion voltage Vp1 to the first counter conductive portion 21C. The second control voltage output section Dp2 applies the second counter conductive portion voltage Vp2 to the second counter conductive portion 22C.

As shown in FIG. 1, the processor 75 may include a resonance frequency adjusting section 75b. The first component obtained from the first detection section 71 and the second component obtained from the second detection section 72 are supplied to the resonance frequency adjusting section 75b. The resonance frequency adjusting section 75b controls at least one of the first control voltage output section Dp1 and the second control voltage output section Dp2 to control the first counter conductive portion voltage Vp1 and the second counter conductive portion voltage Vp2. At this time, at least one of the first counter conductive portion voltage Vp1 being corrected and the second counter conductive portion voltage Vp2 being corrected may be supplied to the sensor element 10U.

For example, the direction of displacement of the movable member 10 when the first counter conductive portion voltage Vp1 changes crosses the direction of displacement of the movable member 10 when the second counter conductive portion voltage Vp2 changes. By the plurality of variable electric springs corresponding to the plurality of directions of the displacement, the resonance frequency can be controlled in any direction.

As shown in FIG. 1, in the embodiment, the second correction value Vx2 may be supplied to the first control voltage output section Dp1 and the second control voltage output section Dp2. Accordingly, the first counter conductive portion voltage Vp1 being corrected and the second counter conductive portion voltage Vp2 being corrected can be supplied to the sensor element 10U. For example, the resonance frequency control is corrected. The resonance frequency can be controlled with higher accuracy.

Thus, the controller 74 is configured to adjust at least one of the first counter conductive portion voltage Vp1 of the first counter conductive portion 21C or the second counter conductive portion voltage Vp2 of the second counter conductive portion 22C based on the second correction value Vx2.

As shown in FIG. 1, the driver 76 may include a first AC voltage output section Dac1 and a second AC voltage output section Dac2. The first AC voltage Vac1 is output from the first AC voltage output section Dac1. The first AC voltage Vac1 is applied to the first end ep1 of the first resistance element R1 via the first adder SU1. The first AC voltage Vac1 is applied to the first counter electrode 21E via the first resistance element R1. An AC component of the first AC voltage Vac1 is applied between the first counter electrode 21E and the first electrode 11E. Thus, the movable member 10 vibrates along one direction, for example, according to the first AC voltage Vac1. The vibration direction includes, for example, a component in the first direction D1.

The second AC voltage Vac2 is output from the second AC voltage output section Dac2. The second AC voltage Vac2 is applied to the second end ep2 of the second resistance element R2 via the second adder SU2. The second AC voltage Vac2 is applied to the second counter electrode 22E via the second resistance element R2. An AC component of the second AC voltage Vac2 is applied between the second counter electrode 22E and the second electrode 12E. Thus, the movable member 10 vibrates along another direction, for example, according to the second AC voltage Vac2. The vibration direction includes, for example, a component in the second direction D2.

For example, in the first correction operation, the movable member 10 is vibrated by the first AC voltage output section Dac1 and the second AC voltage output section Dac2. By detecting this vibration, the first correction value Vx1 can be derived.

In the detection operation as well, the movable member 10 is vibrated by the first AC voltage output section Dac1 and the second AC voltage output section Dac2. For example, the controller 74 is configured to perform the detection operation. In the detection operation, the controller 74 applies the first AC voltage Vac1 between the first electrode 11E and the first counter electrode 21E and applies the second AC voltage Vac2 between the second electrode 12E and the second counter electrode 22E to vibrate the movable member 10.

The controller 74 is configured to detect the external force based on the change of the first component and the second component of the vibration when the movable member 10 receives the external force in the detection operation.

The controller 74 corrects the vibration of the movable member 10 based on the first correction value Vx1 in the detection operation. In the detection operation, the controller 74 supplies, for example, the first control signal SR1 being corrected, the second control signal SR2 being corrected, the first voltage Vdc1 being corrected, and the second voltage Vdc2 being corrected to the sensor element 10U. The controller 74 supplies, for example, the first counter conductive portion voltage Vp1 being corrected and the second counter conductive portion voltage Vp2 being corrected to the sensor element 10U. Detection with high accuracy is possible.

In the first correction operation and the detection operation, the direction of displacement of the movable member 10 when the first voltage Vdc1 changes crosses the direction of displacement of the movable member 10 when the second voltage Vdc2 changes.

In the embodiment, for example, the first component and second component of the vibration when the movable member 10 receives an external force may include a component of the Coriolis force based on the rotational angular velocity acting on the movable member 10. The degree of the component of Coriolis force is detected. Thereby, the rotational angular velocity acting on the movable member 10 may be detected.

For example, when the movable member 10 vibrating rotates by an external force or the like, the vibration state changes. The change of the vibration state is considered to be caused by the action of Coriolis force, for example. For example, the movable member 10 vibrates by a spring mechanism (e.g., the support member 10S). The Coriolis force by angular velocity Ω of rotation acts on the movable member 10 vibrating in the first direction D1. As a result, a component of vibration along the second direction D2 is generated in the movable member 10. The second detection section 72 detects the amplitude of the vibration along the second direction D2. On the other hand, The Coriolis force due to angular velocity Ω of rotation acts on the movable member 10 vibrating in the second direction D2. As a result, a component of vibration along the first direction D1 is generated in the movable member 10. The first detection section 71 detects the amplitude of the vibration along the first direction D1. For example, the amplitude of the first component in the first direction D1 is defined as “Ax”, and the amplitude of the second component in the second direction D2 is defined as “Ay”. The angle θ (rotation angle) corresponds to tan⁻¹(−Ay/Ax), for example.

The controller 74 acquires the first component from the first detection section 71 and acquires the second component from the second detection section 72. A signal (signal Sig0) corresponding to the angle θ (rotation angle) may be output from the controller 74 by the operation performed by the controller 74.

As described above, in the detection operation, the movable member 10 vibrates on an elliptical orbit. The elliptical orbit includes a first length x1 in the long axis direction of the elliptical orbit and a second length x2 in the short axis direction of the elliptical orbit. The first value E is (x1)²+(x2)². The second value Q is the product of x1 and x2.

The controller 74 may perform a first control operation and a second control operation. In the first control operation, the controller 74 obtains the first value E and supplies the first driving force to the movable member 10 to keep the first value E constant. In the second control operation, the controller 74 obtains the second value Q and supplies the second driving force to the movable member 10 to keep the second value Q constant. By such an operation, information on the resonance frequency may be obtained.

In the embodiment, the controller 74 may further perform a time constant correction operation. In the time constant correction operation, the controller 74 changes at least one of the first resistance value, the second resistance value, the first voltage Vdc1, or the second voltage Vdc2 such that a third absolute value of the difference between a first time constant of the first component of the first direction D1 of the vibration and the second time constant of the second direction D2 second component of the vibration becomes small.

As shown in FIG. 1, for example, the processor 75 may include a time constant adjusting section 75a. The first component obtained from the first detection section 71 and the second component obtained from the second detection section 72 are supplied to the time constant adjusting section 75a. The time constant adjusting section 75a controls at least one of the first control signal output section DR1, the second control signal output section DR2, the first voltage output section Ddc1, or the second voltage output section Ddc2 to change at least one of the first resistance value, the second resistance value, the first voltage Vdc1, or the second voltage Vdc2. At this time, at least one of the first resistance value being corrected, the second resistance value being corrected, the first voltage Vdc1 being corrected, or the second voltage Vdc2 being corrected may be supplied to the sensor element 10U.

In the embodiment, the controller 74 may further perform a temperature correction operation. For example, the third absolute value (absolute value of the difference between the first time constant of the first component of the vibration and the second time constant of the second component of the vibration) is changed by a temperature change. The controller 74 is configured to correct the change of the third absolute value due to the temperature change.

Second Embodiment

In the second embodiment, the first correction operation may include the following variations. For example, in the first correction operation, the first correction value Vx1 may further include at least one of a first counter conductive portion voltage correction value for the first counter conductive portion voltage Vp1 or a second counter conductive portion voltage correction value for the second counter conductive portion voltage Vp2 such that the movable member 10 oscillates along the first direction D1.

For example, as described above, when the first correction operation is based on the vibration of the first electrode 11E and the second electrode 12E, the first absolute value of the angle between the direction of the vibration after the correction and the first direction D1 is equal to or less than the first threshold value. In this case, the first absolute value of the angle between the direction of the corrected vibration and the first direction D1 may not be sufficiently small. In this case, the correction of the first counter conductive portion voltage Vp1 and the correction of the second counter conductive portion voltage Vp2 may be further performed. In this way, it is also possible to perform more accurate correction.

In such a deformation of the first correction operation, for example, the absolute value of the angle between the direction of vibration due to at least one of the first counter conductive portion voltage correction value or the second counter conductive portion voltage correction value and the first direction D1 can be smaller than the first threshold value. For example, the difference in the angle from the first direction D1 can be made smaller.

As described above, in the first correction operation, the movable member 10 may vibrate along the first direction D1 with higher accuracy by correcting at least one of the first counter conductive portion voltage Vp1 or the second counter conductive portion voltage Vp2.

The embodiments may include the following configurations (e.g., technical proposals).

Configuration 1

A sensor, comprising:

- a fixed member;
- a movable member supported by the fixed member, the movable member including a first electrode and a second electrode, a first direction from the fixed member to the first electrode crossing a second direction from the fixed member to the second electrode;
- a first counter electrode facing the first electrode, a position of the first counter electrode with respect to the fixed member being fixed, the first counter electrode and the first electrode forming a first comb-teeth electrode pair;
- a second counter electrode facing the second electrode, a position of the second counter electrode with respect to the fixed member being fixed, the second counter electrode and the second electrode forming a second comb-teeth electrode pair;
- a first resistance element including a first end and a first other end, the first other end being electrically connected to the first counter electrode, the first resistance element having a first resistance value;
- a second resistance element including a second end and a second other end, the second other end being electrically connected to the second counter electrode, the second resistance element having a second resistance value; and
- a control device including a controller,
- the controller being configured to apply a first voltage to the first end and a second voltage to the second end,
- the controller being configured to perform a first correction operation in a state where the movable member does not receive an external force,
- in the first correction operation, the controller being configured to cause the movable member to generate a first vibration, the first vibration including a first component in the first direction and a second component in the second direction,
- in the first correction operation, the controller being configured to derive a first correction value based on a first detection result of the first component and a second detection result of the second component, and
- the first correction value including at least one of a first resistance correction value for the first resistance value, a second resistance correction value for the second resistance value, a first voltage correction value for the first voltage, or a second voltage correction value for the second voltage such that the movable member vibrates along the first direction.
  
  Configuration 2

The sensor according to Configuration 1, wherein

- the first correction value includes a first angle between a direction of the first vibration and the first direction.
  
  Configuration 3

The sensor according to Configuration 2, wherein

- a first absolute value of an angle between a direction of a vibration due to at least one of the first resistance correction value, the second resistance correction value, the first voltage correction value, or the second voltage correction value, and the first direction is equal to or less than a first threshold value.
  
  Configuration 4

The sensor according to any one of Configurations 1-3, further comprising:

- a first detection counter electrode; and
- a second detection counter electrode,
- the movable member further including a first detection electrode and a second detection electrode,
- the first detection counter electrode facing the first detection electrode,
- a position of the first detection counter electrode with respect to the fixed member being fixed,
- the first detection counter electrode and the first detection electrode forming a first detection comb-teeth electrode pair,
- the second detection counter electrode facing the second detection electrode,
- a position of the second detection counter electrode with respect to the fixed member being fixed,
- the second detection counter electrode and the second detection electrode forming a second detection comb-teeth electrode pair,
- the fixed member being provided between the first electrode and the first detection electrode in the first direction, and
- the fixed member being provided between the second electrode and the second detection electrode in the second direction.
  
  Configuration 5

The sensor according to Configuration 4, wherein

- the control device includes
  - a first detection section configured to detect a first amplitude of the first component, and
  - a second detection section configured to detect a second amplitude of the second component, and
- the controller is configured to acquire the first component from the first detection section and to acquire the second component from the second detection section.
  
  Configuration 6

The sensor according to Configuration 3, further comprising:

- a first counter conductive portion; and
- a second counter conductive portion,
- the movable member further Including a first conductive portion and a second conductive portion,
- the first counter conductive portion facing the first conductive portion,
- a position of the first counter conductive portion with respect to the fixed member being fixed,
- the second counter conductive portion facing the second conductive portion,
- a position of the second counter conductive portion with respect to the fixed member being fixed,
- a third direction from the fixed member to the first conductive portion crossing the first direction and the second direction,
- a fourth direction from the fixed member to the second conductive portion crossing the first direction and the second direction, and crossing the third direction, and
- the third direction and the fourth direction being along a plane including the first direction and the second direction.
  
  Configuration 7

The sensor according to Configuration 6, wherein

- the controller is configured to apply a first counter conductive portion voltage to the first counter conductive portion, and to apply a second counter conductive portion voltage to the second counter conductive portion,
- the controller is configured to further perform a second correction operation in a state where the movable member does not receive the external force,
- in the second correction operation, the controller is configured to causes the movable member to generate a second vibration, the second vibration includes a third component in the third direction and a fourth component in the fourth direction,
- in the second correction operation, the controller is configured to derive a second correction value based on a third direction detection result of the third component and a fourth direction detection result of the fourth component, and
- the second correction value includes at least one of a first counter conductive portion voltage correction value for the first counter conductive portion voltage and a second counter conductive portion voltage correction value for the second counter conductive portion voltage such that the movable member vibrates along the third direction.
  
  Configuration 8

The sensor according to Configuration 7, wherein

- the controller is configured to perform a resonance frequency correction operation, and
- in the resonance frequency correction operation, the controller is configured to adjust at least one of the first counter conductive portion voltage or the second counter conductive portion voltage such that a second absolute value of a difference between a third resonance frequency of the third component and a fourth resonance frequency of the fourth component becomes small.
  
  Configuration 9

The sensor according to Configuration 6, wherein

- the controller is configured to apply a first counter conductive portion voltage to the first counter conductive portion, and can apply a second counter conductive portion voltage to the second counter conductive portion, and
- the first correction value further includes at least one of a first counter conductive portion voltage correction value for the first counter conductive portion voltage and a second counter conductive portion voltage correction value for the second counter conductive portion voltage.
  
  Configuration 10

The sensor according to Configuration 9, wherein

- an absolute value of the angle between a direction of a vibration caused by at least one of the first counter conductive portion voltage correction value and the second counter conductive portion voltage and the first direction is less than the first threshold.
  
  Configuration 11

The sensor according to any one of Configurations 6-10, wherein

- the first counter conductive portion and the first conductive portion form a first parallel plate electrode pair, and
- the second counter conductive portion and the second conductive portion form a second parallel plate electrode pair.
  
  Configuration 12

The sensor according to any one of Configurations 1-11, wherein

- the controller is configured to further perform a detection operation,
- in the detection operation, the controller is configured to apply a first AC voltage between the first electrode and the first counter electrode and to apply a second AC voltage between the second electrode and the second counter electrode to vibrate the movable member, and
- the controller is configured to detect the external force based on a change of the first component and the second component when the movable member receives the external force in the detection operation.
  
  Configuration 13

The sensor according to Configuration 12, wherein

- the controller is configured to correct a vibration of the movable member based on the first correction value in the detection operation.
  
  Configuration 14

The sensor according to Configuration 13, wherein

- the first component and the second component when the movable member receives the external force include a component of a Coriolis force based on a rotational angular velocity acting on the movable member.
  
  Configuration 15

The sensor according to any one of Configurations 12-14, wherein

- in the detection operation, the movable member oscillates in an elliptical orbit,
- the elliptical orbit includes a first length x1 in a long axis direction of the elliptical orbit and a second length x2 in a short axis direction of the elliptical orbit,