Multiple charged-particle beam apparatus with low crosstalk | Patent Application Number 17708517
17708517
Not Appealed
Patent NumberUS 12165830 B2
Publication NumberUS 20220319797 A1
Filled DateMar 30, 2022
Priority DateMar 30, 2021
Inventor/ApplicantsShichen Gu
Weiming Ren
Qingpo Xi
Weiming REN
Shichen GU
Qingpo XI
Weiming Ren
Qingpo Xi
Weiming REN
Shichen GU
Qingpo XI
Examines-
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