Multiple charged-particle beam apparatus with low crosstalk | Patent Application Number 17708517

17708517
Not Appealed
Patent NumberUS 12165830 B2
Publication NumberUS 20220319797 A1
Filled DateMar 30, 2022
Priority DateMar 30, 2021
Inventor/ApplicantsShichen Gu
Weiming Ren
Qingpo Xi
Weiming REN
Shichen GU
Qingpo XI
Examines-
Art Unit0
Technology Center0
Assignments
Asml Netherlands B.v.
Current
Asml Netherlands B.v.Asml Holding
Original
Law Firm
You must be logged in to view
Login
Attorneys
Subscription-Only
View Concierge Program
Patent Prosecution report image

Empower your practice with Patexia Publication Prosecution IP Module.

Get access to our exclusive rankings and unlock powerful data.
Check our Latest ReportPurchase IP Module

Looking for a Publication Attorney?

Get in touch with our team or create your account to start exploring a network of over 120K attorneys.