Nanoparticle-based etching of silicon surfaces | Patent Application Number 12053372

12053372
Not Appealed
Patent NumberUS 08075792 B1
Publication Number-
Filled DateMar 21, 2008
Priority DateMar 21, 2008
Inventor/ApplicantsDaniel Meier
Howard Branz
Anna Duda
David S. Ginley
James S. Ward
Vernon Yost
ExaminesANGADI, MAKI A
Art Unit1713
Technology Center1700
Assignments
Vertellus Specialties Inc.
Current
Battelle Energy Alliance
Original
Law Firm
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