Tokyo Electron to launch Clean Track Lithius Pro Z to support advanced scaling

Tokyo Electron Limited (TEL) announced today that, in the fall of 2012, the company will release the Clean Track Lithius Pro, the latest model of the 300mm Clean Track Lithius coater/developer series, to enable the advanced scaling necessary for future devices. The Clean Track Lithius Pro Z expands on the core concept of the Clean Track Lithius Pro V by offering even greater throughput and improved defect control to achieve future scaling requirements. It also features improved OEE (Overall Equipment Efficiency) and reduced running costs, contributing to enhanced productivity. The Clean Track Litihus Pro Z offers increased process flexibility to support advanced immersion lithography, including double and multiple patterning scenarios and EUV process.